An X-ray diffraction technique for analyzing structural defects including microstrain in nitride materials

Journal of Crystal Growth

Volumn 318, Issue 1, 2011, Pages 418-422

  Paduano, Q S ^a   Weyburne, D W ^a   Drehman, A J ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

A1. Characterization; A1. Defects; A1. X ray diffraction; B1. Nitrides

Indexed keywords

A1. CHARACTERIZATION; A1. DEFECTS; A1. X-RAY DIFFRACTION; ALN; B1. NITRIDES; BRAGG ANGLES; COHERENCE LENGTHS; COMPUTATION TECHNIQUES; CRYSTAL PLANES; EXTENDED ANALYSIS; GROWTH PROCESS; LATTICE TILTS; MICRO-STRAIN; NITRIDE MATERIALS; STRUCTURAL DEFECT; X-RAY DIFFRACTION TECHNIQUES;

DEFECTS; DIFFRACTION; GALLIUM NITRIDE; MATERIALS PROPERTIES; X RAY DIFFRACTION; X RAYS;

X RAY DIFFRACTION ANALYSIS;

EID: 79952737381     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2010.10.019     Document Type: Conference Paper

References (17)

1. S. Nakamura, T. Mukai, and M. Senoh Appl. Phys. Lett. 64 1994 1687
2. M.C. Schmidt, K.C. Kim, H. Sato, N. Fellow, H. Masui, S. Nakamura, S.P. DenBaars, and J.S. Speck Jnp. J. Appl. Phys. Part 2 46 2007 L126
3. M.A. Moram, and M.E. Vickers Rep. Prog. Phys. 72 2009 036502
4. V. Srikant, J.S. Speck, and D.R. Clarke J. Appl. Phys. 82 1997 4286
5. Yue Jun Sun, O. Brandt, T.Y. Liu, A. Trampert, K.H. Ploog, J. Bläsing, and A. Krost Appl. Phys. Lett. 81 2002 4928
6. S.R. Lee, A.M. West, A.A. Allerman, K.E. Waldrip, D.M. Follstaedt, P.P. Provencio, D.D. Koleske, and R. Abernathy Appl. Phys. Lett. 86 2005 241904
7. Q.S. Paduano, A.J. Drehman, D.W. Weyburne, J. Kozlowski, J. Serafinczuk, J. Jasinski, and Z. Liliental-Weber Phys. Status Solidi C 0 2003 2014
8. R. Chierchia, T. Bottcher, S. Figge, M. Diesselberg, H. Heinke, and D. Hommel Phys. Status Solidi B 228 2001 403
9. T.A. Lafford, B.K. Tanner, and P.J. Parbrook J. Phys. D: Appl. Phys. 36 2003 A245
10. V. Ratnikov, R. Kyutt, T. Shubina, T. Paskova, E. Valcheva, and B. Monemar J. Appl. Phys. 88 2000 6252
11. Q.S. Paduano, D.W. Weyburne, L.O. Bouthillette, S.-Q. Wang, and M.N. Alexander Jpn. J. Appl. Phys. 41 2002 1936
12. Q.S. Paduano, and D.W. Weyburne Jpn. J. Appl. Phys. 44 2005 L150
13. G.K. Williamson, and W.H. Hall Acta Metal. 1 1953 22
14. T. Ida, M. Ando, and H. Toraya J. Appl. Cryst. 33 2000 1311
15. T.H. De Keijser, J.I. Langford, E.J. Mittemeijer, and A.B.P. Vogels J. Appl. Cryst. 15 1982 308
16. Q.S. Paduano, D.W. Weyburne, and A.J. Drehman Phys. Status Solidi A 207 2010 2446
17. M.A. Moram, M.E. Vickers, M.J. Kappers, and C.J. Humphreys J. Appl. Phys. 103 2008 093528