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Volumn 31, Issue 3, 2010, Pages 105-122

LAFAD-assisted plasma surface engineering processes for wear and corrosion protection: A review

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC COATINGS; CERAMIC MATERIALS; CERMETS; CORROSION RESISTANCE; DEPOSITION RATES; DIE CASTING; MORPHOLOGY; SOLID OXIDE FUEL CELLS (SOFC); WEAR OF MATERIALS;

EID: 79952390559     PISSN: 01966219     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/9780470943960.ch9     Document Type: Conference Paper
Times cited : (3)

References (67)
  • 2
    • 0027907998 scopus 로고
    • Process in Plasma-Arc Installation for Vacuum Depositions, Part I: Plasma Generation; Part II: Plasma Propagation
    • V.I. Gorokhovsky, V.P. Polistchook and I.M. Yartsev, Process in Plasma-Arc Installation for Vacuum Depositions, Part I: Plasma Generation; Part II: Plasma Propagation, Surf Coat Tech, 61, 101 (1993).
    • (1993) Surf Coat Tech , vol.61 , pp. 101
    • Gorokhovsky, V.I.1    Polistchook, V.P.2    Yartsev, I.M.3
  • 5
    • 34547357042 scopus 로고    scopus 로고
    • Hard Nanocomposite Films Prepared by Reactive Magnetron Sputtering
    • edited by A. Cavaliero and J. De Hosson, Springer Publishing Co.
    • J. Musil, Hard Nanocomposite Films Prepared by Reactive Magnetron Sputtering, in Nanostructured Coatings, edited by A. Cavaliero and J. De Hosson, Springer Publishing Co. (2006).
    • (2006) Nanostructured Coatings
    • Musil, J.1
  • 6
    • 0029343522 scopus 로고
    • Directional and Preferential Sputtering-Based Physical Vapor Deposition
    • S.M. Rossnagel, Directional and Preferential Sputtering-Based Physical Vapor Deposition, Thin Solid Films 263, 1-12 (1995).
    • (1995) Thin Solid Films , vol.263 , pp. 1-12
    • Rossnagel, S.M.1
  • 8
    • 0036394532 scopus 로고    scopus 로고
    • Practical Applications of Ion Beam and Plasma Processing for Improving Corrosion and Wear Protection
    • M. Klingenberg, J. Arps, R. Wei, J. Demaree, and J. Hirvonen, Practical Applications of Ion Beam and Plasma Processing for Improving Corrosion and Wear Protection, Surf Coat Tech, 158-159, 164-169(2001).
    • (2001) Surf Coat Tech , vol.158-159 , pp. 164-169
    • Klingenberg, M.1    Arps, J.2    Wei, R.3    Demaree, J.4    Hirvonen, J.5
  • 9
    • 33751236799 scopus 로고    scopus 로고
    • Deposition of Thick Nitrides and Carbonitrides for Sand Erosion Protection
    • R. Wei, E. Langa, C. Rincon, and J.H. Arps, Deposition of Thick Nitrides and Carbonitrides for Sand Erosion Protection, Surf Coat Tech, 201, 4453-4459 (2006).
    • (2006) Surf Coat Tech , vol.201 , pp. 4453-4459
    • Wei, R.1    Langa, E.2    Rincon, C.3    Arps, J.H.4
  • 10
    • 0035465756 scopus 로고    scopus 로고
    • Wear Mechanisms of Monolithic and Multicomponent Nitride Coatings Grown by Combined Arc Etching and Unbalanced Magnetron Sputtering
    • Q. Luo, W.M. Rainforth, and W.-D. Münz, Wear Mechanisms of Monolithic and Multicomponent Nitride Coatings Grown by Combined Arc Etching and Unbalanced Magnetron Sputtering, Surf Coat Tech, 146-147, 430-435 (2001).
    • (2001) Surf Coat Tech , vol.146-147 , pp. 430-435
    • Luo, Q.1    Rainforth, W.M.2    Münz, W.-D.3
  • 15
    • 0026205815 scopus 로고
    • The System for Depositing Hard Diamond-Like Films onto Complex-Shaped Machine Elements in an R.F. Arc Plasma
    • Z. Has, S. Mitura, and V.I. Gorokhovsky, The System for Depositing Hard Diamond-Like Films onto Complex-Shaped Machine Elements in an R.F. Arc Plasma, Surf Coat Tech, 47, 106-112 (1991).
    • (1991) Surf Coat Tech , vol.47 , pp. 106-112
    • Has, Z.1    Mitura, S.2    Gorokhovsky, V.I.3
  • 16
    • 0026203514 scopus 로고
    • Superhard i-C Coatings Used in Complex Processes of Surface Strengthening of Tools and Machine Parts
    • N. Novikov, V.I. Gorokhovsky, and B. Uryukov, Superhard i-C Coatings Used in Complex Processes of Surface Strengthening of Tools and Machine Parts, Surf Coat Tech, 47, 770 (1991).
    • (1991) Surf Coat Tech , vol.47 , pp. 770
    • Novikov, N.1    Gorokhovsky, V.I.2    Uryukov, B.3
  • 22
    • 0035972894 scopus 로고    scopus 로고
    • Characterization of Large Area Filtered Arc Deposition Technology: Part I-Plasma Processing Parameters
    • V.I. Gorokhovsky, R. Bhattacharya, and D.G. Bhat, Characterization of Large Area Filtered Arc Deposition Technology: Part I-Plasma Processing Parameters, Surf Coat Tech, 140, 82-92 (2001).
    • (2001) Surf Coat Tech , vol.140 , pp. 82-92
    • Gorokhovsky, V.I.1    Bhattacharya, R.2    Bhat, D.G.3
  • 23
    • 0035978408 scopus 로고    scopus 로고
    • Characterization of Large Area Filtered Arc Deposition Technology: Part II-Coating Properties and Applications
    • V.I. Gorokhovsky, D.G. Bhat, R. Bhattacharya, A.K. Rai, K. Kulkarni, and R. Shivpuri, Characterization of Large Area Filtered Arc Deposition Technology: Part II-Coating Properties and Applications, Surf Coat Tech, 140, 215-224 (2001).
    • (2001) Surf Coat Tech , vol.140 , pp. 215-224
    • Gorokhovsky, V.I.1    Bhat, D.G.2    Bhattacharya, R.3    Rai, A.K.4    Kulkarni, K.5    Shivpuri, R.6
  • 25
    • 0035465658 scopus 로고    scopus 로고
    • Dissolution and Soldering Behavior of Nitrided Hot Working Steel with Multilayer LAFAD PVD Coatings
    • V. Joshi, K. Kulkarni, R. Shivpuri, R.S. Bhattacharya, S.J. Dikshit, and D. Bhat, Dissolution and Soldering Behavior of Nitrided Hot Working Steel with Multilayer LAFAD PVD Coatings, Surf Coat Tech, 146-147, 338-343 (2001).
    • (2001) Surf Coat Tech , vol.146-147 , pp. 338-343
    • Joshi, V.1    Kulkarni, K.2    Shivpuri, R.3    Bhattacharya, R.S.4    Dikshit, S.J.5    Bhat, D.6
  • 26
    • 0035881436 scopus 로고    scopus 로고
    • Review of the Filtered Vacuum Arc Process and Materials Deposition
    • P.J. Martin and A. Bendavid, Review of the Filtered Vacuum Arc Process and Materials Deposition Thin Solid Films, 394, 1-15 (2001).
    • (2001) Thin Solid Films , vol.394 , pp. 1-15
    • Martin, P.J.1    Bendavid, A.2
  • 27
    • 0034492630 scopus 로고    scopus 로고
    • Review of Cathodic Arc Deposition Technology at the Start of the New Millennium
    • D.M. Sanders and A. Anders, Review of Cathodic Arc Deposition Technology at the Start of the New Millennium, Surf Coat Tech, 133-134, 78-90 (2000).
    • (2000) Surf Coat Tech , vol.133-134 , pp. 78-90
    • Sanders, D.M.1    Anders, A.2
  • 28
    • 79952385225 scopus 로고    scopus 로고
    • www.arcomac.com.
  • 29
    • 79952390401 scopus 로고    scopus 로고
    • US Patent No. 7,300,559 November 27
    • V.I. Gorokhovsky, US Patent No. 7,300,559 (November 27, 2007).
    • (2007)
    • Gorokhovsky, V.I.1
  • 30
    • 67650293608 scopus 로고    scopus 로고
    • Deposition of Various Metal, Ceramic and Cermet Coatings by an Industrial-Scale LAFAD Process
    • V.I. Gorokhovsky, C. Bowman, D. VanVoraus, and J. Wallace, Deposition of Various Metal, Ceramic and Cermet Coatings by an Industrial-Scale LAFAD Process," JVSTA, 27, 1080-1095 (2009).
    • (2009) JVSTA , vol.27 , pp. 1080-1095
    • Gorokhovsky, V.I.1    Bowman, C.2    VanVoraus, D.3    Wallace, J.4
  • 31
    • 70849090300 scopus 로고    scopus 로고
    • Characterization of Thick Ceramic and Cermet Coatings Deposited by an Industrial-Scale LAFAD Process
    • V.I. Gorokhovsky, Characterization of Thick Ceramic and Cermet Coatings Deposited by an Industrial-Scale LAFAD Process, Surf Coat Tech, 204, 1216-1221 (2010).
    • (2010) Surf Coat Tech , vol.204 , pp. 1216-1221
    • Gorokhovsky, V.I.1
  • 32
    • 33845302912 scopus 로고    scopus 로고
    • Annealing of Intrinsic Stresses in Sputtered TiN Films: The Role of Thickness-Dependent Gradients of Point Defect Density
    • H. Kostenbauer, G.A. Fontalvo, M. Kapp, J. Keckes, and C. Mitterer, Annealing of Intrinsic Stresses in Sputtered TiN Films: The Role of Thickness-Dependent Gradients of Point Defect Density, Surf Coat Tech 201, 4777-4780 (2007).
    • (2007) Surf Coat Tech , vol.201 , pp. 4777-4780
    • Kostenbauer, H.1    Fontalvo, G.A.2    Kapp, M.3    Keckes, J.4    Mitterer, C.5
  • 33
    • 0029410138 scopus 로고
    • Examination of Mechanical Properties and Failure Mechanisms of TiN and Ti-TiN Multilayer Coatings
    • K.J. Ma, A. Bloyce, and T. Bell, Examination of Mechanical Properties and Failure Mechanisms of TiN and Ti-TiN Multilayer Coatings, Surf Coat Tech, 76-77, (1995) 297-302.
    • (1995) Surf Coat Tech , vol.76-77 , pp. 297-302
    • Ma, K.J.1    Bloyce, A.2    Bell, T.3
  • 34
    • 0029780623 scopus 로고    scopus 로고
    • The Deflection of Cracks at Interfaces
    • W. Lee and W.J. Clegg, "The Deflection of Cracks at Interfaces, Key Engineering Materials, 116-117, 193-208(1996).
    • (1996) Key Engineering Materials , vol.116-117 , pp. 193-208
    • Lee, W.1    Clegg, W.J.2
  • 36
    • 33645096592 scopus 로고    scopus 로고
    • The Effect of Multilayer Filtered Arc Coatings on Mechanical Properties, Corrosion Resistance, and Performance of Periodontal Dental Instruments
    • V.I. Gorokhovsky, B. Heckerman, P. Watson, and N. Bekesch., The Effect of Multilayer Filtered Arc Coatings on Mechanical Properties, Corrosion Resistance, and Performance of Periodontal Dental Instruments, Surf Coat Tech, 200, 5614-5630, (2006).
    • (2006) Surf Coat Tech , vol.200 , pp. 5614-5630
    • Gorokhovsky, V.I.1    Heckerman, B.2    Watson, P.3    Bekesch, N.4
  • 37
    • 79952411593 scopus 로고    scopus 로고
    • Advanced Surface Engineering Technology for Endodontic Instruments and Related Applications
    • V.I. Gorokhovsky, B. Heckerman, and T. Brown, Advanced Surface Engineering Technology for Endodontic Instruments and Related Applications, Roots, Number 2, 40-50 (2006).
    • (2006) Roots , Issue.2 , pp. 40-50
    • Gorokhovsky, V.I.1    Heckerman, B.2    Brown, T.3
  • 38
    • 79952370030 scopus 로고    scopus 로고
    • Advanced Surface Engineering Technology for Endodontic Instruments and Related Applications
    • Endo Supplement
    • V.I. Gorokhovsky, B. Heckerman, and T. Brown, Advanced Surface Engineering Technology for Endodontic Instruments and Related Applications, International Dental Tribune, Endo Supplement, (2006).
    • (2006) International Dental Tribune
    • Gorokhovsky, V.I.1    Heckerman, B.2    Brown, T.3
  • 39
    • 79952408783 scopus 로고    scopus 로고
    • www.am-eagle.com
  • 40
    • 14644417212 scopus 로고    scopus 로고
    • High-Temperature Oxidation Resistance and Surface Electrical Conductivity of Stainless Steels with Filtered Arc Cr-Al-N Multilayer and/or Superlattice Coatings
    • P.E. Gannon, C.T. Tripp, A.K. Knospe, C.V.R. Ramana, M. Deibert, R.J. Smith, V.I. Gorokhovsky, V. Shutthanandan, and D. Gelles, High-Temperature Oxidation Resistance and Surface Electrical Conductivity of Stainless Steels with Filtered Arc Cr-Al-N Multilayer and/or Superlattice Coatings, Surf Coat Tech, 188-189, 55-61 (2004).
    • (2004) Surf Coat Tech , vol.188-189 , pp. 55-61
    • Gannon, P.E.1    Tripp, C.T.2    Knospe, A.K.3    Ramana, C.V.R.4    Deibert, M.5    Smith, R.J.6    Gorokhovsky, V.I.7    Shutthanandan, V.8    Gelles, D.9
  • 45
    • 33745934218 scopus 로고    scopus 로고
    • Application of Vacuum Deposition Methods to Solid Oxide Fuel Cells
    • L.R. Pederson, P. Singh, and X.-D. Zhon, Application of Vacuum Deposition Methods to Solid Oxide Fuel Cells, Vacuum, 80, 1066-1083 (2006).
    • (2006) Vacuum , vol.80 , pp. 1066-1083
    • Pederson, L.R.1    Singh, P.2    Zhon, X.-D.3
  • 46
    • 0024078686 scopus 로고
    • An Induction Method of Determining Conduction-Zone Size in a Vacuum Arc
    • V.I. Gorokhovsky, V.P. Elovikov, P.L. Lizunov, and S.A. Pantyukhin, An Induction Method of Determining Conduction-Zone Size in a Vacuum Arc, High Temp, 26, 170-175 (1988).
    • (1988) High Temp , vol.26 , pp. 170-175
    • Gorokhovsky, V.I.1    Elovikov, V.P.2    Lizunov, P.L.3    Pantyukhin, S.A.4
  • 47
    • 43649104078 scopus 로고    scopus 로고
    • Deposition and Characterization of Hybrid Filtered Arc-Magnetron Multilayer Nanocomposite Cermet Coatings for Advanced Tribological Applications
    • V.I. Gorokhovsky, C. Bowman, P.E. Gannon, D. VanVorous, J. Hu, C. Muratore, A.A. Voevodin, and Y.S. Kang, Deposition and Characterization of Hybrid Filtered Arc-Magnetron Multilayer Nanocomposite Cermet Coatings for Advanced Tribological Applications, Wear 265, 741-755 (2008).
    • (2008) Wear , vol.265 , pp. 741-755
    • Gorokhovsky, V.I.1    Bowman, C.2    Gannon, P.E.3    VanVorous, D.4    Hu, J.5    Muratore, C.6    Voevodin, A.A.7    Kang, Y.S.8
  • 51
    • 70849090300 scopus 로고    scopus 로고
    • Characterization of Thick Ceramic and Cermet Coatings Deposited by an Industrial-Scale LAFAD Process
    • Presentation at ICMCT, San Diego, California USA (2008) and published in
    • V.I. Gorokhovsky, Characterization of Thick Ceramic and Cermet Coatings Deposited by an Industrial-Scale LAFAD Process, Presentation at ICMCT, San Diego, California USA (2008) and published in Surf Coat Tech, 204, 1216-1221 (2010).
    • (2010) Surf Coat Tech , vol.204 , pp. 1216-1221
    • Gorokhovsky, V.I.1
  • 53
    • 70149114780 scopus 로고    scopus 로고
    • Influence of Si Content on the Structure and Internal Stress of the Nanocomposite TiSiN Coatings Deposited by Large Area Filtered Arc Deposition
    • Y.H. Cheng, T. Browne, B. Heckerman, J.C. Jiang, E.I. Meletis, C. Bowman, and V.I. Gorokhovsky, Influence of Si Content on the Structure and Internal Stress of the Nanocomposite TiSiN Coatings Deposited by Large Area Filtered Arc Deposition, J Phys D: Appl Phys 42 125415 (2009).
    • (2009) J Phys D: Appl Phys , vol.42 , pp. 125415
    • Cheng, Y.H.1    Browne, T.2    Heckerman, B.3    Jiang, J.C.4    Meletis, E.I.5    Bowman, C.6    Gorokhovsky, V.I.7
  • 54
    • 58149512539 scopus 로고    scopus 로고
    • Nanocomposite TiSiN Coatings Deposited by Large Area Filtered Arc Deposition
    • Y.H. Cheng, T. Browne, and B. Heckerman, Nanocomposite TiSiN Coatings Deposited by Large Area Filtered Arc Deposition, J Vac Sci Tech A, 27, 82-88 (2009).
    • (2009) J Vac Sci Tech A , vol.27 , pp. 82-88
    • Cheng, Y.H.1    Browne, T.2    Heckerman, B.3
  • 55
    • 0027908056 scopus 로고
    • Development of Arc Evaporation of Non-Stoichiometric Titanium Nitride Coatings
    • A. Sue, Development of Arc Evaporation of Non-Stoichiometric Titanium Nitride Coatings, Surf Coat Tech, 62, 115-120 (1993).
    • (1993) Surf Coat Tech , vol.62 , pp. 115-120
    • Sue, A.1
  • 58
    • 79952371515 scopus 로고    scopus 로고
    • Principles and Applications of Vacuum Arc Plasma-Assisted Surface Engineering Technologies
    • edited by I. Rajagopal, K.S. Rajam, and R.V. Krishnan, Allied Publishers, Ltd., Mumbai, India
    • V.I. Gorokhovsky and D.G. Bhat, Principles and Applications of Vacuum Arc Plasma-Assisted Surface Engineering Technologies, Proceedings of the GOI-UNDP International Workshop on Surface Engineering and Coatings, Bangalore, India, edited by I. Rajagopal, K.S. Rajam, and R.V. Krishnan, Allied Publishers, Ltd., Mumbai, India (1999).
    • (1999) Proceedings of the GOI-UNDP International Workshop on Surface Engineering and Coatings, Bangalore, India
    • Gorokhovsky, V.I.1    Bhat, D.G.2
  • 60
    • 79952410677 scopus 로고    scopus 로고
    • Final Report prepared for The U.S. Department of Energy (Contract No. DE-FG02-03ER83809), UES, Inc. Dayton, Ohio USA
    • A.K, Rai, Development of Protective Coatings for Single Crystal Turbine Blades, Final Report prepared for The U.S. Department of Energy (Contract No. DE-FG02-03ER83809), UES, Inc. Dayton, Ohio USA (2006).
    • (2006) Development of Protective Coatings for Single Crystal Turbine Blades
    • Rai, A.K.1
  • 62
    • 0035506708 scopus 로고    scopus 로고
    • Characterization of AlN Thin Films Deposited by Filtered Cathodic Arc Process
    • S.J. Dixit, A.K. Rai, R. Bhattacharya, and S. Guha, Characterization of AlN Thin Films Deposited by Filtered Cathodic Arc Process, Thin Solid Films, 398-399, 17 (2001).
    • (2001) Thin Solid Films , vol.398-399 , pp. 17
    • Dixit, S.J.1    Rai, A.K.2    Bhattacharya, R.3    Guha, S.4
  • 64
    • 0035342195 scopus 로고    scopus 로고
    • Indentation Hardness Evaluation of Cathodic Arc Deposited Thin Hard Coatings
    • J.R. Tuck, A.M. Korsunsky, D.G. Bhat, and S.J. Bull, Indentation Hardness Evaluation of Cathodic Arc Deposited Thin Hard Coatings, Surf Coat Tech, 139, 63-74 (2001).
    • (2001) Surf Coat Tech , vol.139 , pp. 63-74
    • Tuck, J.R.1    Korsunsky, A.M.2    Bhat, D.G.3    Bull, S.J.4
  • 67
    • 85008596975 scopus 로고    scopus 로고
    • Deposition and Properties of Tetrahedral Amorphous Carbon Films Prepared on Magnetic Hard Disks
    • C.Y. Chan, K.H. Lai, M.K. Fung, W.K. Wong, I. Bello, R.F. Huang, C.S. Lee, and S.T. Lee, Deposition and Properties of Tetrahedral Amorphous Carbon Films Prepared on Magnetic Hard Disks, J Vac Sci Tech, A19, 1606-1610 (2001).
    • (2001) J Vac Sci Tech , vol.A19 , pp. 1606-1610
    • Chan, C.Y.1    Lai, K.H.2    Fung, M.K.3    Wong, W.K.4    Bello, I.5    Huang, R.F.6    Lee, C.S.7    Lee, S.T.8


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