High-rate deposition of photocatalytic TiO2 films by oxygen plasma assist reactive evaporation method

Thin Solid Films

Volumn 516, Issue 17, 2008, Pages 5860-5863

  Sakai, Tetsuya ^a   Kuniyoshi, Yuji ^a   Aoki, Wataru ^a   Ezoe, Sho ^a   Endo, Tatsuya ^a   Hoshi, Yoichi ^a  

^a TOKYO POLYTECHNIC UNIVERSITY   (Japan)

Author keywords

Hydrophilicity; Organics decomposition; Oxygen plasma assisted reactive evaporation (OPARE) method; Photocatalytic; Titanium dioxide

Indexed keywords

DECOMPOSITION; DEPOSITION; EVAPORATION; HYDROPHILICITY; PHOTOCATALYSIS; PLASMAS;

FILM DEPOSITION; FILM STRUCTURE; ORGANICS-DECOMPOSITION; OXYGEN PLASMA ASSISTED REACTIVE EVAPORATION (OPARE) METHOD;

TITANIUM DIOXIDE;

EID: 44249092354     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.039     Document Type: Article

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