Time-resolved measurement of emission profiles in pulsed radiofrequency glow discharge optical emission spectroscopy: Investigation of the pre-peak

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 65, Issue 7, 2010, Pages 533-541

  Alberts, D ^a   Horvath, P ^b   Nelis, Th ^c,d   Pereiro, R ^a   Bordel, N ^a   Michler, J ^b   Sanz Medel, A ^a  

^a UNIVERSITY OF OVIEDO   (Spain)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^c Laboratoire Plasma et Conversion d'Energie   (France)

^d UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Emission profile; Glow discharge; Optical emission spectroscopy; Pre peak; Pulsed; Radiofrequency

Indexed keywords

ANALYTICAL SIGNALS; CALIBRATION CURVES; DISCHARGE PARAMETERS; DUTY CYCLES; EMISSION PEAKS; EMISSION PROFILE; GLOW-DISCHARGE OPTICAL EMISSION SPECTROSCOPY; HIGH CONCENTRATION; METASTABLE LEVELS; OFF TIME; OPERATION CONDITIONS; PRE-PEAK; PULSE EMISSIONS; PULSE PARAMETER; PULSE PROFILE; PULSE WIDTH; PULSED MODE; RADIO FREQUENCIES; RADIOFREQUENCY GLOW DISCHARGES; TIME RESOLVED MEASUREMENT;

ABSORPTION; EMISSION SPECTROSCOPY; GLOW DISCHARGES; LIGHT EMISSION; PHOTORESISTS;

OPTICAL EMISSION SPECTROSCOPY;

EID: 77955427478     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2010.05.011     Document Type: Article

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