Use of a single multiplexed CMOS oscillator as direct frequency read-out for an array of eight AlN contour-mode NEMS resonant sensors

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 2666-2670

  Rinaldi, Matteo ^a   Zuniga, Chiara ^a   Duick, Brandon ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALLAN DEVIATION; ALN; CMOS OSCILLATORS; CMOS PROCESSS; FREQUENCY SHIFT; LIMIT OF DETECTION; NANOSCALED; ON CHIPS; OSCILLATOR CIRCUITS; PER UNIT; RESONANT SENSORS; SATURATED VAPOR PRESSURE; TIME MULTIPLEXED; TRANSMISSION GATE;

ALUMINUM NITRIDE; CMOS INTEGRATED CIRCUITS; METHANOL; MULTIPLEXING; NITRIDES; OSCILLATORS (ELECTRONIC);

SENSORS;

EID: 79951889992     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5689874     Document Type: Conference Paper

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