A low-loss MEMS tunable capacitor with movable dielectric

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 651-654

  Zhu, Y ^a   Yuce, M R ^a   Moheimani, S O R ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION PRINCIPLES; DC BIAS; DEVICE LAYERS; ELECTROSTATIC ACTUATION; HIGH Q FACTOR; LOW LOSS; MEASUREMENT RESULTS; NEW DESIGN; PARALLEL PLATES; PULL IN EFFECTS; Q-FACTORS; RF SIGNAL; SOI-MEMS; TUNABLE CAPACITORS; TUNING RANGES; VARIABLE CAPACITOR;

CAPACITORS; ELECTROSTATIC ACTUATORS; Q FACTOR MEASUREMENT; SENSORS; TUNING;

CAPACITANCE;

EID: 77951123587     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398334     Document Type: Conference Paper

References (8)

1. Th. G. S. M. Rijks, J. T. M. Beek, P. G. Steeneken, M. J. E. Ulenaers, J. D. Coster and R. Puers, "RF MEMS Tunable Capacitors with Large Tuning Ratio", IEEE MEMS Conference, p. 777-780, 2004.
2. A. Dec and K. Suyama, "Micromachined electromechanically tunable capacitors and their applications to RF IC's", IEEE Trans. Microwave Theory and Techn. 46(12), 1998, 2587
3. H. A. C. Tilmans, W. D. Raedt and E. Beyne, "MEMS for Wireless communications: from RF-MEMS Components to RF-MEMS-SiP", J.Micromech.Microeng., vol. 13, p. S139-S163, 2003.
4. M. R. Zadeh, A. K. Samarao, P. Monajemi, and F. Ayazi, "Low-voltage large value tunable capacitors using self-aligned HARPSS", Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 319-322
5. J. B. Yoon, C. T. C. Nguyen, "A High-Q Tunable Micromechanical Capacitor with Movable Dielectric for RF Applicaitons", IEEE IEDM, p. 489-492, 2000.
6. Y. J. Yoon, H. S. Lee and J. B.Yoon, "MEMS Variable Capacitor Actuated with an Electrically Floating Plate", IEEE IEDM, p. 431-434, 2007.
7. G. M. Rebeiz, "RF MEMS Theory, Design, and Technology", 1st edition, Wiley-Interscience, p328, 2002.
8. http://www.memscap.com/en-mumps.html