A novel multisite silicon probe for high quality laminar neural recordings

Sensors and Actuators, A: Physical

Volumn 166, Issue 1, 2011, Pages 14-21

  Grand, László ^a,b   Pongrácz, Anita ^c   Vázsonyi, Éva ^c   Márton, Gergely ^c   Gubán, Dorottya ^c   Fiáth, Richárd ^b   Kerekes, Bálint Péter ^b   Karmos, György ^a,b   Ulbert, István ^a,b   Battistig, Gábor ^c  

^a PÁZMÁNY PÉTER CATHOLIC UNIVERSITY   (Hungary)

^b INSTITUTE FOR PSYCHOLOGY   (Hungary)

^c RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Local field potentials; Multichannel silicon probes; Multielectrodes; Neural interface; Single unit activity; Wet chemical etching

Indexed keywords

LOCAL FIELD POTENTIALS; MULTI-CHANNEL; MULTIELECTRODES; NEURAL INTERFACES; SINGLE UNIT ACTIVITY; WET-CHEMICAL ETCHING;

ELECTROPHYSIOLOGY; INDEPENDENT COMPONENT ANALYSIS; PLATINUM; PROBES;

WET ETCHING;

EID: 79951673456     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.12.019     Document Type: Article

References (53)

1. M. Chicurel Windows on the brain Nature 412 2001 266 268 (Pubitemid 32691817)
2. A. Bragin, J.F. Hetke, C.L. Wilson, D.J. Anderson, J. Engel, and G. Buzsáki Multiple site silicon-based probes for chronic recordings in freely moving rats: implantation, recording and histological verification J. Neurosci. Meth. 98 2000 77 82 (Pubitemid 30317444)
3. G. Buzsaki Large-scale recording of neuronal ensembles Nat. Neurosci. 7 2004 446 451 (Pubitemid 38544574)
4. T.A. Christensen, V.M. Pawlowski, H. Lei, and J.G. Hildebrand Multi-unit recordings reveal context-dependent modulation of synchrony in odor-specific neural ensembles Nat. Neurosci. 3 2000 927 931
5. J. Csicsvari, D.A. Henze, B. Jamieson, K.D. Harris, A. Sirota, P. Bartho, K.D. Wise, and G. Buzsaki Massively parallel recording of unit and local field potentials with silicon-based electrodes J. Neurophysiol. 90 2003 1314 1323 (Pubitemid 37092608)
6. B.L. McNaughton, J. O'Keefe, and C.A. Barnes The stereotrode: a new technique for simultaneous isolation of several single units in the central nervous system from multiple unit records J. Neurosci. Methods 8 1983 391 397 (Pubitemid 13046831)
7. J. O'Keefe, and M.L. Recce Phase relationship between hippocampal place units and the EEG theta rhythm Hippocampus 3 1993 317 330 (Pubitemid 23231466)
8. M.A. Wilson, and B.L. McNaughton Dynamics of the hippocampal ensemble code for space Science 261 1993 1055 1058 (Pubitemid 23300867)
9. G. Karmos, M. Molnar, and V. Csepe A new multielectrode for chronic recording of intracortical field potentials in cats Physiol. Behav. 29 1982 567 571 (Pubitemid 13215079)
10. J.L. Kubie A driveable bundle of microwires for collecting single-unit data from freely-moving rats Physiol. Behav. 32 1984 115 118 (Pubitemid 14179691)
11. K.C. Cheung Implantable microscale neural interfaces Biomed. Microdevices 9 2007 923 938 (Pubitemid 350020688)
12. I. Ulbert Multiple Channel Microelectrode System for Human Epilepsy Research Conf IEEE/BiOCAS 2006 222 225
13. I. Ulbert, E. Halgren, G. Heit, and G. Karmos Multiple microelectrode-recording system for human intracortical applications J. Neurosci. Methods 106 2001 69 79 (Pubitemid 32193016)
14. D. Fabo, Z. Magloczky, L. Wittner, A. Pek, L. Eross, S. Czirjak, J. Vajda, A. Solyom, G. Rasonyi, A. Szucs, A. Kelemen, V. Juhos, L. Grand, B. Dombovari, P. Halasz, T.F. Freund, E. Halgren, G. Karmos, and I. Ulbert Properties of in vivo interictal spike generation in the human subiculum Brain 131 2008 485 499 (Pubitemid 351197608)
15. I. Ulbert, Z. Magloczky, L. Eross, S. Czirjak, J. Vajda, L. Bognar, S. Toth, Z. Szabo, P. Halasz, D. Fabo, E. Halgren, T.F. Freund, and G. Karmos In vivo laminar electrophysiology co-registered with histology in the hippocampus of patients with temporal lobe epilepsy Exp. Neurol. 187 2004 310 318 (Pubitemid 38610277)
16. M.A. Nicolelis, D. Dimitrov, J.M. Carmena, R. Crist, G. Lehew, J.D. Kralik, and S.P. Wise Chronic, multisite, multielectrode recordings in macaque monkeys, Proc Natl. Acad. Sci. U. S. A. 100 2003 11041 11046 (Pubitemid 37140149)
17. G. Kotzar, M. Freas, P. Abel, A. Fleischman, S. Roy, C. Zorman, J.M. Moran, and J. Melzak Evaluation of MEMS materials of construction for implantable medical devices Biomaterials 23 2002 2737 2750 (Pubitemid 34465734)
18. K. Najafi, and K.D. Wise An implantable multielectrode array with on-chip signal processing IEEE Solid-St. Circ. 21 1986 1035 1044 (Pubitemid 17500540)
19. D.J. Anderson, K. Najafi, S.J. Tanghe, and D.A. Evans Batch fabricated thin-film electrodes for stimulation of the central auditory system IEEE Trans. Biomed. Eng. 36 1989 693 704 (Pubitemid 19172391)
20. Q. Bai, K.D. Wise, and D.J. Anderson A high-yield microassembly structure for three-dimensional microelectrode arrays IEEE Trans. Biomed. Eng. 47 2000 281 289 (Pubitemid 30143403)
21. P.K. Campbell, K.E. Jones, R.J. Huber, K.W. Horch, and R.A. Normann A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array IEEE Trans. Biomed. Eng. 38 1991 758 768
22. M. Ghovanloo, K.D. Wise, and K. Najafi Towards a button-sized 1024-site wireless cortical microstimulating array Conf. Proc. 1st Int. IEEE Neural Eng. 2003 138 141
23. M.D. Gingerich, J.F. Hetke, D.J. Anderson, and K.D. Wise A 256-site CMOS microelectrode array for multipoint stimulation and recording in the central nervous system Intl. Conf. Solid State Sens. Act. 2001 416 419
24. K. Najafi, K.D. Wise, and T. Mochizuki A high-yield IC-compatible multichannel recording array IEEE Trans. Electron. Devices 32 1985 1206 1211 (Pubitemid 16463585)
25. D. Rakwal, S. Heamawatanachai, P. Tathireddy, F. Solzbacher, and E. Bamberg Fabrication of compliant high aspect ratio silicon microelectrode arrays using micro-wire electrical discharge machining Microsyst. Technol. 15 2009 789 797
26. K.D. Wise, J.B. Angell, and A. Starr An integrated-circuit approach to extracellular microelectrodes IEEE Trans. Biomed. Eng. 17 1970 238 247
27. D.T. Kewley, M.D. Hills, D.A. Borkholder, I.E. Opris, N.I. Maluf, C.W. Storment, J.M. Bower, and G.T.A. Kovacs Plasma-etched neural probes Sens. Actuators A: Phys. 58 1997 27 35 (Pubitemid 127388320)
28. S.J. Oh, J.K. Song, J.W. Kim, and S.J. Kim A high-yield fabrication process for silicon neural probes IEEE Trans. Biomed. Eng. 53 2006 351 354 (Pubitemid 43162425)
29. T.H. Yoon, E.J. Hwang, D.Y. Shin, S.I. Park, and S.J. Oh A micromachined silicon depth probe for multichannel neural recording IEEE Trans. Biomed. Eng. 47 2000 1082 1087
30. K.C. Cheung, K. Djupsund, Y. Dan, and L.P. Lee Implantable multichannel electrode array based on SOI technology J. Microelctromech. Syst. 12 2003 179 184
31. P. Norlin, M. Kindlundh, A. Mouroux, K. Yoshida, and U.G. Hofmann A 32-site neural recording probe fabricated by DRIE of SOI substrates J. Microelctromech. Microeng. 12 2002 414 419 (Pubitemid 34830217)
32. M. Kindlundh, P. Norlin, and U.G. Hofmann A neural probe process enabling variable electrode configurations Sens. Actuators B: Chem. 102 2004 51 58
33. H.P. Neves, G.A. Orban, M. Koudelka-Hep, and P. Ruther Development of modular multifunctional probe arrays for cerebral applications Conf. Proc. 3rd Int. IEEE Neural Eng. 2007 104 109 (Pubitemid 47432173)
34. P. Ruther, A. Aarts, O. Frey, S. Herwik, S. Kisban, K. Seidl, S. Spieth, A. Schumacher, M. Koudelka-Hep, O. Paul, T. Stieglitz, R. Zengerle, and H.P. Neves The neuroprobes project - multifunctional probe arrays for neural recording and stimulation Conf. Proc. 13th IFESS 53 2008 238 240
35. S. Kisban, S. Herwik, K. Seidl, B. Rubehn, A. Jezzini, M.A. Umilt, L. Fogassi, T. Stieglitz, O. Paul, and P. Ruther Microprobe array with low impedance electrodes and highly flexible polyimide cables for acute neural recording Conf. Proc. IEEE/EMBS 2007 175 178
36. S. Spieth, A. Schumacher, K. Seidl, K. Hiltmann, S. Haeberle, R. McNamara, J.W. Dalley, S.A. Edgley, P. Ruther, and R. Zengerle Robust microprobe systems for simultaneous neural recording and drug delivery 4th Europ. Conf. IFMBE, vol. 22 2008 2426 2430
37. O. Frey, P. van der Wal, N. de Rooij, and M. Koudelka-Hep Development and characterization of choline and l-glutamate biosensor integrated on silicon microprobes for in-vivo monitoring Conf. Proc. IEEE/EMBS 2007 6040 6043
38. A.A.A. Aarts, H.P. Neves, I. Ulbert, L. Wittner, L. Grand, M.B.A. Fontes, S. Herwik, S. Kisban, O. Paul, P. Ruther, R.P. Puers, and C. Van Hoof A 3D slim-base probe array for in vivo recorded neuron activity Conf. Proc. IEEE/EMBS 2008 5798 5801
39. S. Herwik, S. Kisban, A.A.A. Aarts, K. Seidl, G. Girardeau, K. Benchenane, M.B. Zugaro, S.I. Wiener, O. Paul, H.P. Neves, and P. Ruther Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording J. Micromech. Microeng. 19 2009 1 11
40. Y.Y. Chen, H.Y. Lai, S.H. Lin, C.W. Cho, W.H. Chao, C.H. Liao, S. Tsang, Y.F. Chen, and S.Y. Lin Design and fabrication of a polyimide-based microelectrode array: application in neural recording and repeatable electrolytic lesion in rat brain J. Neurosci. Methods 182 2009 6 16
41. T. Stieglitz, and M. Gross Flexible BIOMEMS with electrode arrangements on front and back side as key component in neural prostheses and biohybrid systems Sens. Actuators B: Chem. 83 2002 8 14 (Pubitemid 34232219)
42. D. Pellinen, T. Moon, R. Vetter, R. Miriani, and D. Kipke Multifunctional flexible parylene-based intracortical microelectrodes Conf. Proc. IEEE/EMBS, vol. 5 2005 5272 5275 (Pubitemid 46230142)
43. C.W. Lin, Y.T. Lee, C.W. Chang, W.L. Hsu, Y.C. Chang, and W. Fang Novel glass microprobe arrays for neural recording Biosens. Bioelectron. 25 2009 475 481
44. J.J. Burmeister, K. Moxon, and G.A. Gerhardt Ceramic-based multisite microelectrodes for electrochemical recordings Anal. Chem. 72 2000 187 192 (Pubitemid 30027755)
45. K.A. Moxon, N.M. Kalkhoran, M. Markert, M.A. Sambito, J.L. McKenzie, and J.T. Webster Nanostructured surface modification of ceramic-based microelectrodes to enhance biocompatibility for a direct brain-machine interface IEEE Trans. Biomed. Eng. 51 2004 881 889 (Pubitemid 38661438)
46. Hungarian patent application, Nr.: P0900774.
47. E. Vazsonyi, Z. Vertesy, A. Toth, and J. Szlufcik Anisotropic etching of silicon in a two-component alkaline solution J. Micromech. Microeng. 13 2003 165 169
48. M. Steriade, A. Nunez, and F. Amzica A novel slow (<1 Hz) oscillation of neocortical neurons in vivo: depolarizing and hyperpolarizing components J. Neurosci. 13 1993 3252 3265 (Pubitemid 23241166)
49. E.W. Keefer, B.R. Botterman, M.I. Romero, A.F. Rossi, and G.W. Gross Carbon nanotube coating improves neuronal recordings Nat. Nanotechnol. 3 2008 434 439 (Pubitemid 351948248)
50. K. Najafi, J. Ji, and K.D. Wise Scaling limitations of silicon multichannel recording probes IEEE Trans. Biomed. Eng. 37 1990 1 11 (Pubitemid 20123429)
51. R.A. Normann, P.K. Campbell, and W.P. Li Silicon based microstructures suitable for intracortical electrical stimulation (visual prosthesis application) Conf. Proc. IEEE/EMBS 1988 714 715
52. S.J. Oh, J.K. Song, and S.J. Kim Neural interface with a silicon neural probe in the advancement of microtechnology Biotechnol. Bioprocess. Eng. 8 2003 252 256
53. R. Csercsa, B. Dombovari, D. Fabo, L. Wittner, L. Eross, L. Entz, A. Solyom, G. Rasonyi, A. Szucs, A. Kelemen, R. Jakus, V. Juhos, L. Grand, A. Magony, P. Halasz, T.F. Freund, Z. Magloczky, S.S. Cash, L. Papp, G. Karmos, E. Halgren, and I. Ulbert Laminar analysis of slow wave activity in humans Brain 133 2010 2814 2829