Flexible BIOMEMS with electrode arrangements on front and back side as key component in neural prostheses and biohybrid systems

Sensors and Actuators, B: Chemical

Volumn 83, Issue 1-3, 2002, Pages 8-14

  Stieglitz, Thomas ^a   Gross, Matthias ^a  

^a FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING   (Germany)

Author keywords

Double sided electrodes; Flexible substrate; MEMS; Neural prostheses; Polyimide

Indexed keywords

ELECTROCHEMICAL ELECTRODES; MICROELECTRODES; MICROMACHINING; POLYIMIDES; PROSTHETICS; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPIC ANALYSIS; SUBSTRATES;

BIOHYBRID SYSTEMS; NEURAL PROSTHESES;

MICROELECTROMECHANICAL DEVICES;

EID: 0037086015     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01021-8     Document Type: Conference Paper

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