The design, fabrication and characterization of a silicon microheater for an integrated MEMS gas preconcentrator

Journal of Micromechanics and Microengineering

Volumn 18, Issue 12, 2008, Pages

  Yeom, Junghoon ^a   Field, Christopher R ^b   Bae, Byunghoon ^a   Masel, Richard I ^b   Shannon, Mark A ^a,b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; HEATING EQUIPMENT; MONOLITHIC INTEGRATED CIRCUITS; PUMPS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; VALVES (MECHANICAL);

DEVICE LAYERS; ENERGY CONSUMPTION.; INJECTION SPEEDS; KEY COMPONENTS; LOW POWERS; MICRO GASSES; MICRO HEATERS; MICROVALVES; MONOLITHIC INTEGRATIONS; PRECONCENTRATION; PRECONCENTRATOR; SILICON ON INSULATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 58149326766     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/12/125001     Document Type: Article

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