Formation and annealing of dislocation loops induced by nitrogen implantation of ZnO

Journal of Applied Physics

Volumn 109, Issue 2, 2011, Pages

  Perillat Merceroz, Guillaume ^a   Gergaud, Patrice ^a   Marotel, Pascal ^a   Brochen, Stephane ^a   Jouneau, Pierre Henri ^a   Feuillet, Guy ^a  

^a CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALED LAYERS; BASAL PLANES; BEFORE AND AFTER; CONCENTRATION REGION; DEFECT DIFFUSION; DISLOCATION LOOP; ELECTRICAL AND OPTICAL PROPERTIES; EXTENDED DEFECT; HIGH TEMPERATURE; IMPLANTED LAYERS; NITROGEN IMPLANTATION; NITROGEN IONS; NONRADIATIVE DEFECTS; OUT OF EQUILIBRIUM; P-TYPE DOPING; PRISMATIC PLANES; PROMISING MATERIALS; RESIDUAL DEFORMATION; SHORT WAVELENGTHS; STACKING FAULT ENERGIES; STRUCTURAL FEATURE; SUBSURFACE REGIONS; UNIAXIAL DEFORMATION; XRD; XRD MEASUREMENTS; ZNO; ZNO SUBSTRATE;

COALESCENCE; DEFECTS; DEFORMATION; ELECTRIC PROPERTIES; ION IMPLANTATION; NITROGEN; OPTICAL PROPERTIES; OPTOELECTRONIC DEVICES; POINT DEFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

ANNEALING;

EID: 79551676698     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3537917     Document Type: Article

References (50)

1. U. Özgür, Y. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Dogan, V. Avrutin, S. Cho, and H. Morkoc, J. Appl. Phys. 0021-8979 98, 041301 (2005). 10.1063/1.1992666 (Pubitemid 41348664)
2. A. Janotti and C. G. Van de Walle, Rep. Prog. Phys. 0034-4885 72, 126501 (2009). 10.1088/0034-4885/72/12/126501
3. X. M. Duan, C. Stampfl, M. M. M. Bilek, and D. R. McKenzie, Phys. Rev. B 0556-2805 79, 235208 (2009). 10.1103/PhysRevB.79.235208
4. J. L. Lyons, A. Janotti, and C. G. Van de Walle, Appl. Phys. Lett. 0003-6951 95, 252105 (2009). 10.1063/1.3274043
5. A. Tsukazaki, A. Ohtomo, T. Onuma, M. Ohtani, T. Makino, M. Sumiya, K. Ohtani, S. F. Chichibu, S. Fuke, Y. Segawa, H. Ohno, H. Koinuma, and M. Kawasaki, Nature Mater. 1476-1122 4, 42 (2005). 10.1038/nmat1284 (Pubitemid 40021000)
6. K. Nakahara, S. Akasaka, H. Yuji, K. Tamura, T. Fujii, Y. Nishimoto, D. Takamizu, A. Sasaki, T. Tanabe, H. Takasu, H. Amaike, T. Onuma, S. F. Chichibu, A. Tsukazaki, A. Ohtomo, and M. Kawasaki, Appl. Phys. Lett. 0003-6951 97, 013501 (2010). 10.1063/1.3459139
7. B. T. Adekore, J. M. Pierce, R. F. Davis, D. W. Barlage, and J. F. Muth, J. Appl. Phys. 0021-8979 102, 024908 (2007). 10.1063/1.2751097 (Pubitemid 47193076)
8. J. Kennedy, B. T. Adekore, J. M. Pierce, R. F. Davis, D. W. Barlage, and J. F. Muth, J. Appl. Phys. 0021-8979 107, 103518 (2010). 10.1063/1.3380592
9. F. Reuss, C. Kirchner, Th. Gruber, R. Kling, S. Maschek, W. Limmer, A. Waag, and P. Ziemann, J. Appl. Phys. 0021-8979 95, 3385 (2004). 10.1063/1.1650899
10. H. Wang, B. S. Kang, J. Chen, T. Anderson, S. Jang, F. Ren, H. S. Kim, Y. J. Li, D. P. Norton, and S. J. Pearton, Appl. Phys. Lett. 0003-6951 88, 102107 (2006). 10.1063/1.2186508
11. Q. L. Gu, C. C. Ling, G. Brauer, W. Anwand, W. Skorupa, Y. F. Hsu, A. B. Djurisic, C. Y. Zhu, S. Fung, and L. W. Lu, Appl. Phys. Lett. 0003-6951 92, 222109 (2008). 10.1063/1.2940204
12. D. Walsh, Solid-State Electron. 0038-1101 20, 813 (1977). 10.1016/0038-1101(77)90169-1
13. P. Fons, H. Tampo, A. V. Kolobov, M. Ohkubo, S. Niki, J. Tominaga, R. Carboni, F. Boscherini, and S. Friedrich, Phys. Rev. Lett. 0031-9007 96, 045504 (2006). 10.1103/PhysRevLett.96.045504 (Pubitemid 43270889)
14. T. M. Børseth, F. Tuomisto, J. S. Christensen, E. V. Monakhov, B. G. Svensson, and A. Y. Kuznetsov, Phys. Rev. B 0556-2805 77, 045204 (2008). 10.1103/PhysRevB.77.045204
15. Z. Q. Chen, T. Sekiguchi, X. L. Yuan, M. Maekawa, and A. Kawasuso, J. Phys.: Condens. Matter 0953-8984 16, S293 (2004). 10.1088/0953-8984/16/2/035
16. B. Meyer, H. Alves, D. Hofmann, W. Kriegseis, D. Forster, F. Bertram, J. Christen, A. Hoffmann, M. Strassburg, M. Dworzak, U. Haboeck, and A. Rodina, Phys. Status Solidi B 0370-1972 241, 231 (2004). 10.1002/pssb.200301962 (Pubitemid 39307710)
17. P. Marotel, G. Perillat-Merceroz, C. Granier, F. Ponthenier, F. Fau, G. Feuillet, and J. Bleuse, The Sixth International Workshop on Zinc Oxide and Related Materials, Changchun, China, Aug. 5-7, 2010.
18. V. A. Coleman, H. H. Tan, C. Jagadish, S. O. Kucheyev, and J. Zou, Appl. Phys. Lett. 0003-6951 87, 231912 (2005). 10.1063/1.2140481 (Pubitemid 41741066)
19. S. Zhou, K. Potzger, J. von Borany, R. Gretzschel, W. Skorupa, M. Helm, and J. Fassbender, Phys. Rev. B 0556-2805 77, 035209 (2008). 10.1103/PhysRevB.77.035209
20. K. Trachenko, J. M. Pruneda, E. Artacho, and M. T. Dove, Phys. Rev. B 0556-2805 71, 184104 (2005). 10.1103/PhysRevB.71.184104 (Pubitemid 41743146)
21. S. O. Kucheyev, J. S. Williams, C. Jagadish, J. Zou, C. Evans, A. J. Nelson, and A. V. Hamza, Phys. Rev. B 0556-2805 67, 094115 (2003). 10.1103/PhysRevB.67.094115
22. J. J. Couderc, Microsc. Microanal. Microstruct. 1154-2799 6, 229 (1995). 10.1051/mmm:1995101
23. T. Yoshiie, H. Iwanaga, N. Shibata, K. Suzuki, and S. Takeuchi, Philos. Mag. A 0141-8610 41, 935 (1980). 10.1080/01418618008243897
24. K. Lorenz, E. Alves, E. Wendler, O. Bilani, W. Wesch, and M. Hayes, Appl. Phys. Lett. 0003-6951 87, 191904 (2005). 10.1063/1.2126137 (Pubitemid 41567631)
25. Z. Q. Chen, M. Maekawa, A. Kawasuso, R. Suzuki, and T. Ohdaira, Appl. Phys. Lett. 0003-6951 87, 091910 (2005). 10.1063/1.2037847 (Pubitemid 41288218)
26. Y. Dong, F. Tuomisto, B. G. Svensson, A. Y. Kuznetsov, and L. J. Brillson, Phys. Rev. B 0556-2805 81, 081201 (2010). 10.1103/PhysRevB.81.081201
27. P. Venńgùs, J. M. Chauveau, M. Korytov, C. Deparis, J. Zuniga-Perez, and C. Morhain, J. Appl. Phys. 0021-8979 103, 083525 (2008). 10.1063/1.2905220 (Pubitemid 351623547)
28. P. M. Voyles, J. L. Grazul, and D. A. Muller, Ultramicroscopy 0304-3991 96, 251 (2003). 10.1016/S0304-3991(03)00092-5 (Pubitemid 36835774)
29. J. P. Hirth and J. Lothe, Theory of Dislocations (Krieger, Malabar, Florida, 1992).
30. J. F. Ziegler, M. D. Ziegler, and J. P. Biersack, Nucl. Instrum. Methods B 268, 1818 (2010). 10.1016/j.nimb.2010.02.091
31. J. Hillairet, C. Mairy, J. Espinasse, and V. Levy, Acta Metall. 0001-6160 18, 1285 (1970). 10.1016/0001-6160(70)90159-8
32. A. Jostsons, R. Blake, J. Napier, P. Kelly, and K. Farrell, J. Nucl. Mater. 0022-3115 68, 267 (1977). 10.1016/0022-3115(77)90251-3
33. H. Föll and M. Wilkens, Phys. Status Solidi A 0031-8965 39, 561 (1977). 10.1002/pssa.2210390224
34. J. Wong-Leung, M. Janson, A. Kuznetsov, B. Svensson, M. Linnarsson, A. Hallen, C. Jagadish, and D. Cockayne, Nucl. Instrum. Methods Phys. Res. B 0168-583X 266, 1367 (2008). 10.1016/j.nimb.2007.12.049
35. N. Goland and D. T. Keating, J. Appl. Phys. 0021-8979 41, 814 (1970). 10.1063/1.1658759
36. R. Bullough and M. H. Wood, J. Nucl. Mater. 0022-3115 90, 1 (1980). 10.1016/0022-3115(80)90241-X
37. T. Yoshiie, H. Iwanaga, N. Shibata, K. Suzuki, M. Ichihara, and S. Takeuchi, Philos. Mag. A 0141-8610 47, 315 (1983). 10.1080/01418618308245228
38. A. Janotti and C. G. Van de Walle, Phys. Rev. B 0556-2805 76, 165202 (2007). 10.1103/PhysRevB.76.165202
39. P. Erhart and K. Albe, Appl. Phys. Lett. 0003-6951 88, 201918 (2006). 10.1063/1.2206559 (Pubitemid 43786121)
40. P. Erhart and K. Albe, Phys. Rev. B 0556-2805 73, 115207 (2006). 10.1103/PhysRevB.73.115207 (Pubitemid 43443903)
41. M. Griffiths, J. Nucl. Mater. 0022-3115 205, 225 (1993). 10.1016/0022-3115(93)90085-D
42. M. Gallagher, Metall. Trans. 0026-086X 1, 2429 (1970).
43. S. I. Molina, A. M. Sanchez, F. J. Pacheco, R. Garcia, M. A. Sanchez-Garcia, F. J. Sanchez, and E. Calleja, Appl. Phys. Lett. 0003-6951 74, 3362 (1999). 10.1063/1.123345
44. J. Chisholm and P. Bristowe, J. Cryst. Growth 0022-0248 230, 432 (2001). 10.1016/S0022-0248(01)01285-4 (Pubitemid 32715629)
45. C. Bonafos, D. Mathiot, and A. Claverie, J. Appl. Phys. 0021-8979 83, 3008 (1998). 10.1063/1.367056
46. R. Raman, M. E. Law, V. Krishnamoorthy, K. S. Jones, and S. B. Herner, Appl. Phys. Lett. 0003-6951 74, 1591 (1999). 10.1063/1.123626 (Pubitemid 129708794)
47. C. H. Woo, Philos. Mag. A 0141-8610 63, 915 (1991). 10.1080/ 01418619108213924
48. G. Leo, A. Drigo, and A. Traverse, Mater. Sci. Eng., B 0921-5107 16, 123 (1993). 10.1016/0921-5107(93)90027-K
49. L. D. Yao, D. Weissenberger, M. Durrschnabel, D. Gerthsen, I. Tischer, M. Wiedenmann, M. Feneberg, A. Reiser, and K. Thonke, J. Appl. Phys. 0021-8979 105, 103521 (2009). 10.1063/1.3132865
50. Y. Yang, X. W. Sun, B. K. Tay, G. F. You, S. T. Tan, and K. L. Teo, Appl. Phys. Lett. 0003-6951 93, 253107 (2008). 10.1063/1.3054639