Mechanical property of low temperature deposited TiN film by pulsed biased arc ion plating

Jinshu Xuebao/Acta Metallurgica Sinica

Volumn 39, Issue 5, 2003, Pages 516-

  Huang, Meidong ^a   Sun, Chao ^a   Lin, Guoqiang ^a   Dong, Chuang ^a   Wen, Lishi ^a  

^a NONE

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EID: 0038336710     PISSN: 04121961     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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