Nanostructured multilayers of TiN/ZrN obtained by magnetron sputtering

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 4, Issue 11, 2007, Pages 4127-4133

  Caicedo A , J C ^a,b   Bejarano G , G ^a,d   Gomez, M E ^b   Prieto, P ^b   Cortez C ^c   Munoz J ^c  

^a SENA Regional Valle   (Colombia)

^b UNIVERSIDAD DEL VALLE   (Colombia)

^c DEPARTAMENTO DE FÍSICA   (Mexico)

^d UNIVERSIDAD DE ANTIOQUIA   (Colombia)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH-PURITY; MULTI-TARGET; NANOSTRUCTURED MULTILAYERS; NOVEL MATERIALS; STEEL SUBSTRATES; THIN FILMS; TIN/ZRN;

FILM PREPARATION; INDUSTRIAL APPLICATIONS; MAGNETRONS; MULTILAYERS; NONMETALS; SILICON; THICK FILMS; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE; ZIRCONIUM;

MAGNETRON SPUTTERING;

EID: 49549100902     PISSN: 18626351     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssc.200675912     Document Type: Conference Paper

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