Ti/TiN multilayer coatings: Deposition technique, characterization and mechanical properties

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 579-584

  Duck A ^a   Gamer, N ^a   Gesatzke, W ^a   Griepentrog, M ^a   Osterle W ^a   Sahre, M ^a   Urban, I ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Cross sectional transmission elelctron microscopy (XTEM); Magnetron sputtering; Mechanical properties; Multilayer; Ti TiN

Indexed keywords

HARDNESS TESTING; INDENTATION; PHYSICAL VAPOR DEPOSITION; PLASTIC FILMS; SPUTTERING; SUBSTRATES; THICKNESS CONTROL; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

MULTILAYER COATINGS;

MULTILAYERS;

COATING; DEPOSITION; HARDNESS; SPUTTERING; TITANIUM; TITANIUM NITRIDE;

EID: 0035386683     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0257-8972(01)01171-9     Document Type: Article

References (16)