|
Volumn 1321, Issue , 2010, Pages 298-301
|
Evaluation of surface damage on organic materials irradiated with Ar cluster ion beam
a a b,c a,c a,c b,c |
Author keywords
Ar gas cluster; damage evaluation; FIB; TOF SIMS; XPS
|
Indexed keywords
|
EID: 79251581260
PISSN: 0094243X
EISSN: 15517616
Source Type: Conference Proceeding
DOI: 10.1063/1.3548386 Document Type: Conference Paper |
Times cited : (4)
|
References (17)
|