Evaluation of damage layer in an organic film with irradiation of energetic ion beams

Japanese Journal of Applied Physics

Volumn 49, Issue 3 PART 1, 2010, Pages

  Hada, Masaki ^a   Ibuki, Sachi ^a   Ninomiya, Satoshi ^a   Seki, Toshio ^a   Aoki, Takaaki ^a   Matsuo, Jiro ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; CLUSTER ION BEAMS; DAMAGED LAYERS; ENERGETIC ION BEAMS; IRRADIATED SURFACE; MONOMER ION BEAMS; OPTICAL METHODS; ORGANIC FILMS; PMMA FILMS; SPUTTERING YIELDS; SURFACE DAMAGES;

ARGON; BEAM PLASMA INTERACTIONS; ELLIPSOMETRY; ION BEAMS; ION BOMBARDMENT; IONS; MEASUREMENTS; MONOMERS; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

DAMAGE DETECTION;

EID: 77953976985     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.036503     Document Type: Article

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