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Materials Science and Engineering: A

Volumn 217-218, Issue , 1996, Pages 74-77

Effects of bombardment by high energy gas cluster ion beams

(4) Takeuchi, D a Matsuo, J a Kitai, A a Yamada, I a

a KYOTO UNIVERSITY (Japan)

Author keywords

Bombardment; Gas cluster ion beams

Indexed keywords

ARGON; ELECTRON ENERGY LEVELS; HIGH ENERGY PHYSICS; ION BOMBARDMENT; RADIATION EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; SILICA; SURFACES;

CLUSTER SIZE EFFECT; GAS CLUSTER ION BEAMS; IRRADIATION DAMAGE;

ION BEAMS;

EID: 0030260453 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5093(96)10300-2 Document Type: Article

Times cited : (20)

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