Enhanced optical constants of nanocrystalline yttrium oxide thin films

Applied Physics Letters

Volumn 98, Issue 3, 2011, Pages

  Ramana, C V ^a   Mudavakkat, V H ^a   Bharathi, K Kamala ^a   Atuchin, V V ^b   Pokrovsky, L D ^b   Kruchinin, V N ^b  

^a University of Texas at El Paso   (United States)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSION PROFILE; INDEX OF REFRACTION; NANOCRYSTALLINE FILMS; NANOCRYSTALLINES; NANOSCALE DIMENSIONS; OXIDE THIN FILMS; SI (100) SUBSTRATE; SIZE EFFECTS; SPECTROSCOPIC ELLIPSOMETRY MEASUREMENTS;

AMORPHOUS FILMS; CRYSTALLITE SIZE; OPTICAL CONSTANTS; OXIDE FILMS; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; YTTRIUM; YTTRIUM ALLOYS; YTTRIUM OXIDE;

OPTICAL FILMS;

EID: 79251536241     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3524202     Document Type: Article

References (23)

1. J. Kwo, M. Hong, A. R. Kortan, K. T. Queeney, Y. J. Chabal, J. P. Mannaerts, T. Boone, J. J. Krajewski, A. M. Sergent, and J. M. Rosamilla, Appl. Phys. Lett. 0003-6951 77, 130 (2000). 10.1063/1.126899
2. S. Zhang and R. Xiao, J. Appl. Phys. 0021-8979 83, 3842 (1998). 10.1063/1.366615
3. Y. Zhao, K. Kita, K. Kyuno, and A. Toriumi, Appl. Phys. Lett. 0003-6951 94, 042901 (2009). 10.1063/1.3075954
4. A. C. Rastogi and R. N. Sharma, Semicond. Sci. Technol. 0268-1242 16, 641 (2001). 10.1088/0268-1242/16/8/301
5. Y. Nigara, Jpn. J. Appl. Phys. 7, 404 (1968). 10.1143/JJAP.7.404
6. S. Y. Chiam, W. K. Chim, C. Pi, A. C. H. Huan, S. J. Wang, J. S. Pan, S. Turner, and J. Zhang, J. Appl. Phys. 0021-8979 103, 083702 (2008). 10.1063/1.2904928
7. C. Cannas, M. Casu, M. Mainas, A. Musinu, G. Piccaluga, S. Polizzi, A. Speghini, and M. Bettinelli, J. Mater. Chem. 0959-9428 13, 3079 (2003). 10.1039/b305992h
8. S. Ekambaram, K. C. Patil, and M. Maaza, J. Alloys Compd. 0925-8388 393, 81 (2005). 10.1016/j.jallcom.2004.10.015
9. B. Mercier, C. Dujardin, G. Ledoux, C. Louis, O. Tillement, and P. Perriat, J. Appl. Phys. 0021-8979 96, 650 (2004). 10.1063/1.1756690
10. T. H. Hsu, H. C. You, F. H. Ko, and T. F. Lei, J. Electrochem. Soc. 0013-4651 153, G934 (2006). 10.1149/1.2337846
11. T. M. Pan and J. W. Chen, Appl. Phys. Lett. 0003-6951 93, 183510 (2008). 10.1063/1.3021360
12. Y. N. Tan, W. K. Chim, B. J. Cho, and W. K. Choi, IEEE Trans. Electron Devices 0018-9383 51, 1143 (2004). 10.1109/TED.2004.829861
13. R. J. Gaboriaud, F. Paillouxb, P. Guerina, and F. Paumier, Thin Solid Films 0040-6090 400, 106 (2001). 10.1016/S0040-6090(01)01468-7
14. S. K. Gullapalli, R. S. Vemuri, and C. V. Ramana, Appl. Phys. Lett. 0003-6951 96, 171903 (2010). 10.1063/1.3421540
15. JCPDS Card No. 43-613.
16. C. V. Ramana, S. Utsunomiya, R. C. Ewing, U. Becker, V. V. Atuchin, V. Sh. Aliev, and V. N. Kruchinin, Appl. Phys. Lett. 0003-6951 92, 011917 (2008). 10.1063/1.2811955
17. G. E. Jellison, Jr., Thin Solid Films 0040-6090 313-314, 33 (1998). 10.1016/S0040-6090(97)00765-7
18. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, New York, 2007).
19. D. E. Aspnes, Handbook of Optical Constants of Solids (Academic, New York, 1985), pp. 759-760.
20. F. Wooten, Optical Properties of Solids (Academic, New York, 1972).
21. G. Malandrino, M. Blandion, M. E. Fragala, M. Losurdo, and G. Bruno, J. Phys. Chem. B 1089-5647 112, 9595 (2008).
22. R. G. Toro, G. Malandrino, M. Blandion, I. L. Fragala, R. L. Nigro, M. Losurdo, and G. Bruno, J. Phys. Chem. B 1089-5647 108, 16357 (2004). 10.1021/jp048083j
23. C. V. Ramana, R. S. Vemuri, I. Fernandez, and A. L. Campbell, Appl. Phys. Lett. 0003-6951 95, 231905 (2009). 10.1063/1.3271697