Subwavelength structures for infrared filtering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7713, Issue , 2010, Pages

  Kurth, Steffen ^a   Hiller, Karla ^b   Neumann, Norbert ^c   Seifert, Mario ^b   Ebermann, Martin ^c   Zajadacz, Joachim ^d   Gessner, Thomas ^a  

^a FRAUNHOFER INSTITUTE FOR ELECTRONIC NANO SYSTEMS ENAS   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c INFRATEC GMBH   (Germany)

^d LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Fabry Perot Interferometer; FDTM; Ring resonator

Indexed keywords

E-BEAM LITHOGRAPHY; EXPERIMENTAL INVESTIGATIONS; FABRY-PEROT; FDTM; FIXED WAVELENGTH; FOURIER TRANSFORM INFRARED SPECTROMETER; INFRARED FILTERS; LAYER STACKS; LINEAR POLARIZATION; METAL RINGS; POLARIZATION ANGLE; REFLECTION COEFFICIENTS; RING RESONATOR; SILICON NITRIDE THIN FILMS; SUB-WAVELENGTH STRUCTURES;

FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; OPTICAL INSTRUMENTS; OPTICAL RESONATORS; PHOTONIC CRYSTALS; PHOTONIC DEVICES; POLARIZATION; REFLECTION; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE;

FABRY-PEROT INTERFEROMETERS;

EID: 79251496102     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.854609     Document Type: Conference Paper

References (18)

1. Otto, T., Saupe, R., Weiss, A., Stock, V., Throl, O., Grählert, W., Kaskel, S., Schreck, H. and Gessner, T., "MEMS analyzer for fast determination of mixed gases," Proc. SPIE 7208, 72080E (2009).
2. Grabarnik, S., Emadi, A., Wu, H., de Graaf, G. and Wolffenbuttel, R.F., "Microspectrometer with a concave grating fabricated in a MEMS technology, " Procedia Chemistry, Volume 1, 401-404, Proceedings of the Eurosensors XXIII conference (2009).
3. Sandner, T., Kenda, A., Drabe, C., Schenk, H., Scherf, W., "Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator," Proc. SPIE 6466, 646602-1 - 646602-12 (2007).
4. www.boehringer-ingelheim.de/produkte/mikrosystemtechnik/mikrooptik/ nir-fs-en.pdf, 2010-02-13.
5. Knudtson, J. T., Levy, D. S., Herr, K. C., "Electronically tunable, first-order Fabry-Pérot infrared filter," Opt. Eng., Vol. 35, 2313 (1996).
6. Rossberg, D., "Silicon micromachined infrared sensor with tunable wavelength selectivity for application in infrared spectroscopy," Sens. Actuators A 47, 413-416, (1995).
7. Noro, M., Suzuki, K., Kishi, N., Hara, H.,Watanabe, T., Iwaoko, H., "CO2/H2O gas sensor using tunable Fabry-Perot filter with wide wavelength range," Proc. IEEE MEMS Conf., 319-322 (2003).
8. Stupar, P. A., Borwick, R. L., DeNatale, J. F., Kobrin, P. H., Gunning, W. J., "MEMS tunable Fabry-Perot filters with thick, two sided optical coatings," Proc. IEEE Transducers 2009 Conf., 1357-1360 (2009).
9. Kurth, S., Hiller, K., Neumann, N., Heinze, M., Dötzel, W., Gessner, T., "A tunable Fabry-Perot-Interferometer for 3 - 4.5 μm wavelength with bulk micromachined reflector carrier," Proc. SPIE 4983, 215-226 (2003).
10. Neumann, N., Ebermann, M., Kurth, S., Hiller, K., "Tunable infrared detector with integrated micromachined Fabry-Perot filter," J.Micro/Nanolith. MEMS MOEMS 7(2), 021004-01 - 021004-9 (2008)
11. Palik, E. D., Boukari, H., Gammon, R. W., "Experimental study of the effect of surface defects on the finesse and contrast of a Fabry-Perot interferometer," Appl. Opt. 35, 38-50 (1996). (Pubitemid 126590850)
12. Moon, J., Shkel, A. M., "Performance limits of a micromachined tunable-cavity filter," Proc. Int. Conf. MSM, 2001, pp. 278-281 (2001)
13. Ebermann, M., Neumann, N., Hiller, K., Gittler, E., Meinig, M. and Kurth, S., "Recent advances in expanding the spectral range of MEMS Fabry-Perot filters," Proc. SPIE 7594, 75940V (2010).
14. Parker, E.A., Hamdy, S. M. A., "Rings as elements for frequency selective surfaces," ELECTRONICS LETTERS, Vol.17 No. 17, 612-614 (1981).
15. Porterfield, D. W., Hesler, J. L., Densing, R., Mueller, E. R., Crowe, T. W., and Weikle, R. M, "Resonant metal-mesh bandpass filters for the far infrared," APPLIED OPTICS, Vol. 33, 6046-6052 (1994).
16. Brückner, F., Clausnitzer, T., Burmeister, O., Friedrich, D., Kley, E.-B., Danzmann, K., Tünnermann, A. and Schnabel, R., "100% reflectivity from a monolithic dielectric microstructured surface, " Proc. SPIE 6883, 68830X (2008).
17. Chang, J.-Y., Hsu, C.-L., Wang, C.-M., Wu, M.-L., Lan, H.-C., Lee, Y.-C., Tsai, Y.-L., Liu, Y.-C., Yang, T.- H. and Tu, S.-H., "Silicon-based micro and subwavelength optical elements and applications," Proc. SPIE 6310, 63100D (2006).
18. Bisaillon, E., Tan, D., Faraji, B., Kirk, A., Chrowstowski, L. and Plant, D. V, "High reflectivity air-bridge subwavelength grating reflector and Fabry-Perot cavity in AlGaAs/GaAs," Optics Express, Vol. 14, 2573-2582 (2006).