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Volumn 7208, Issue , 2009, Pages
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MEMS analyzer for fast determination of mixed gases
a
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Author keywords
Gas measurement; Mems; NIR spectroscopy; Process control
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Indexed keywords
CHEMOMETRIC EVALUATION;
COST-EFFICIENT;
DIRECT MEASUREMENT;
GAS ANALYZERS;
GAS COMPOSITIONS;
GAS CONDITIONS;
GAS MEASUREMENT;
HEAT CONDUCTIVITY;
INDIVIDUAL COMPONENTS;
INDUSTRIAL PROCESS;
IR ABSORPTION;
LABORATORY USE;
LOW COSTS;
MEASUREMENT RESULTS;
MEASUREMENT TIME;
MEMS DESIGN;
MIXED GAS;
NIR SPECTROSCOPY;
OPERATION AND CONTROL;
PROCESS LINE;
PRODUCT QUALITY;
QUANTITATIVE DETERMINATIONS;
WAVELENGTH STABILITY;
WHOLE SYSTEMS;
COST EFFECTIVENESS;
COSTS;
GAS ABSORPTION;
GAS FUEL MEASUREMENT;
GAS MIXTURES;
INFRARED DEVICES;
INFRARED SPECTROSCOPY;
MEMS;
MICROELECTROMECHANICAL DEVICES;
NEAR INFRARED SPECTROSCOPY;
OPTICAL SYSTEMS;
SPECTROSCOPIC ANALYSIS;
PROCESS CONTROL;
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EID: 67649211439
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.816231 Document Type: Conference Paper |
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Times cited : (3)
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References (6)
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