MEMS tunable Fabry-Perot filters with thick, two sided optical coatings

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1357-1360

  Stupar, P A ^a   Borwick III, R L ^a   DeNatale, J F ^a   Kobrin, P H ^a   Gunning, W J ^a  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

Author keywords

Fabry Perot; Imaging; MEMS; Spectral imaging; Tunable filter

Indexed keywords

FABRICATED PARTS; FABRY-PEROT; INFRA RED; M-FILTERS; OPTICAL REFLECTOR; SOI DEVICES; SPECTRAL IMAGING; SPECTRAL INFORMATION; STRESS STATE; STRINGENT REQUIREMENT; THICK COATINGS; TUNABLE FABRY-PEROT FILTERS; TUNABLE FILTERS;

ACTUATORS; FABRY-PEROT INTERFEROMETERS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; OPTICAL COATINGS; OPTICAL DESIGN; OPTICAL FILTERS; OPTICAL SYSTEMS; PIEZOELECTRIC TRANSDUCERS; REFLECTION; RING LASERS;

SOLID-STATE SENSORS;

EID: 71449102084     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285853     Document Type: Conference Paper

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