Silicon-based micro and subwavelength optical elements and applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6310, Issue , 2006, Pages

  Chang, Jenq Yang ^a   Hsu, Che Lung ^a   Wang, Chih Ming ^a   Wu, Mount Learn ^a   Lan, Hsiao Chin ^a   Lee, Yun Chih ^a   Tsai, Ya Lun ^a   Liu, Yung Chih ^a   Yang, Tsung Hsun ^a   Tu, Sheng Han ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Biosensor; DNA hybridization; Guided mode resonance effect; Membrane; Micro nano optical elements; Microelectromechanical system (MEMS); Micromachining; Optical bench; Pickup head; Silicon photonics; Silicon based; Subwavelength

Indexed keywords

BIOSENSORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; OPTICAL COLLIMATORS; SILICON NITRIDE;

DNA HYBRIDIZATION; GUIDED MODE RESONANCE EFFECT; OPTICAL BENCH; PICKUP HEAD; SILICON PHOTONICS; SUBWAVELENGTH;

HOLOGRAPHIC OPTICAL ELEMENTS;

EID: 33750686344     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.683275     Document Type: Conference Paper

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