Microspectrometer with a concave grating fabricated in a MEMS technology

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 401-404

  Grabarnik, S ^a   Emadi, A ^a   Wu, H ^a   de Graaf, G ^a   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

concave diffraction grating; MEMS; Microspectrometer

Indexed keywords

COMPATIBLE PROCESS; CONCAVE DIFFRACTION GRATING; CONCAVE GRATING; FABRICATION TECHNIQUE; FLAT SUBSTRATES; FLEXIBLE MEMBRANES; MEMS TECHNOLOGY; MICRO-SPECTROMETER; PATTERN TRANSFERS; PLANAR GRATING; SUBNANOMETERS;

DEMULTIPLEXING; DIFFRACTION; DIFFRACTION GRATINGS; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

FABRICATION;

EID: 71549151304     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.100     Document Type: Conference Paper

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