Recent advances in expanding the spectral range of MEMS Fabry-Pérot filters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7594, Issue , 2010, Pages

  Ebermann, Martin ^a   Neumann, Norbert ^a   Hiller, Karla ^b   Gittler, Elvira ^c   Meinig, Marco ^d   Kurth, Steffen ^d  

^a INFRATEC GMBH   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c JENOPTIK Laser Optik Systeme GmbH   (Germany)

^d FRAUNHOFER INSTITUTE FOR ELECTRONIC NANO SYSTEMS ENAS   (Germany)

Author keywords

Bragg reflector; Fabry Perot interferometer; Finesse; MWIR microspectrometer; Tunable infrared filter

Indexed keywords

BROAD BANDWIDTHS; FABRY-PEROT FILTERS; INFRARED FILTERS; MICRO-SPECTROMETER; MWIR MICROSPECTROMETER; NUMBER OF LAYERS; PEAK TRANSMITTANCE; PHASE DISPERSION; REFLECTOR DESIGN; ROT FILTER; SIMULATION AND MEASUREMENT; SPECTRAL RANGE;

BRAGG REFLECTORS; FABRY-PEROT INTERFEROMETERS; FIBER OPTIC SENSORS; INFRARED DETECTORS; INFRARED RADIATION; MOEMS; OPTICAL INSTRUMENTS; REFLECTION; REFRACTIVE INDEX;

DIELECTRIC MATERIALS;

EID: 77951521405     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.843441     Document Type: Conference Paper

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