A tunable Fabry-Perot-Interferometer for 3 - 4.5 μm wavelength with bulk micromachined reflector carrier

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4983, Issue , 2003, Pages 215-226

  Kurth, Steffen ^a   Hiller, Karla ^b   Neumann, Norbert ^c   Heinze, Matthias ^c   Dötzel, Wolfram ^b   Gessner, Thomas ^a,b  

^a FRAUNHOFER IZM   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c INFRATEC GMBH   (Germany)

Author keywords

Dielectric layer stack; Interferometer; Spectrometer; Tunable optical filter

Indexed keywords

CARRIER COMMUNICATION; DIELECTRIC MATERIALS; FABRY-PEROT INTERFEROMETERS; LASER TUNING; MICROMACHINING;

REFLECTOR CARRIERS;

OPTICAL FILTERS;

EID: 0038058727     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. J.-L. Leclerq, M. Garrigues, X. Letartre, C. Seassal, P. Viktorovitch, InP-based MOEMS and related topics, J. Micromech. Microeng. 10 (2000) 287-293
2. P. Bondavalli, T. Benyattou, M. Garrigues, J. L. Leclercq, S. Jourba, C. Pautet, X. Hugon, Opto-mechanical design of tuneable InP-based Fabry-Perot filter for gas analysis, Sensors and Actuators A 94 (2001) 136-141
3. J. H. Correia, M. Bartek, R. F. Wolffenbuttel, Bulk-micromachined tuneable Fabry-Perot microinterferometerfor the visible spectral range, Sensors and Actuators 76 (1999) 191-196
4. M. Bartek, J. H. Correia, R. F. Wolffenbuttel, Silver-based reflective coatings for micromachined optical filters, J. Micromech. Microeng. 9 (1999) 162-165
5. J. L. Kühn, R. B. Barcley, M. A. Greenhouse, D. B. Mott, S. Satyapal, Electro-mechanical simulation of a large aperture MOEMS Fabry-Perot tunable filter, Proc. of SPIE Vol. 4178 (2000) 325-335
6. A. Letho, M. Blomberg, A. Torkkeli: Electrically adjustable optical filter, International Patent WO 98/14804
7. D. F. Edwards, Silicon in E. D. Palik (Editor), Handbook of optical constants of solids, Academic Press, 1985, 547-569
8. 2) (Glass) in E. D. Palik (Editor) Handbook of optical constants of solids, Academic Press, 1985, 547-569
9. th Int. Symp. on Semiconductor Wafer Bonding, Sciense, Technology and Applications, Vol. 97/36, 1-12
10. K. Killer, R. Hahn, C. Kaufmann, S. Kurth, K. Kehr, T. Gessner, W. Dötzel, M. Wiemer, I. Schubert, Low temperature approaches for fabrication of high-frequency microscanners, Proc. Of SPIE Vol. 3878-08, 58-64, Santa Clara, 20-22 September 1999