Fabrication of multi-level 3-dimension microstructures by phase inversion process

Nano-Micro Letters

Volumn 2, Issue 2, 2010, Pages 95-100

  Song, Y ^a  

^a BEIHANG UNIVERSITY   (China)

Author keywords

Fabrication; Microstructures; Multi level; Phase inversion; Photolithography; Sealing

Indexed keywords

EID: 78651481381     PISSN: 23116706     EISSN: 21505551     Source Type: Journal    
DOI: 10.5101/nml.v2i2.p95-100     Document Type: Article

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