DLC nano-dot surfaces for tribological applications in MEMS devices

Applied Surface Science

Volumn 257, Issue 8, 2011, Pages 3153-3157

  Singh, R Arvind ^a   Na, Kyounghwan ^a   Yi, Jin Woo ^a   Lee, Kwang Ryeol ^a   Yoon, Eui Sung ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Adhesion; Diamond like carbon; Friction; Micro; Nano; Tribology; Wear

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; FRICTION; MEMS; MINIATURE INSTRUMENTS; NANODOTS; TRIBOLOGY; WEAR OF MATERIALS;

DIAMOND LIKE CARBON; MICRO; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NANO; TRIBOLOGICAL APPLICATIONS; TRIBOLOGICAL EVALUATIONS; TRIBOLOGICAL PERFORMANCE; TRIBOLOGICAL PROPERTIES;

SURFACE PROPERTIES;

EID: 78651369896     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.10.131     Document Type: Article

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