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Volumn 37, Issue 6, 1999, Pages 1387-1402
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The construction of production performance prediction system for semiconductor manufacturing with artificial neural networks
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Author keywords
[No Author keywords available]
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Indexed keywords
BENCHMARKING;
LIFE CYCLE;
MATHEMATICAL MODELS;
NEURAL NETWORKS;
PROCESS CONTROL;
SCHEDULING;
SEMICONDUCTOR DEVICE MANUFACTURE;
SERVICE LIFE;
STRATEGIC PLANNING;
THROUGHPUT;
PROACTIVE ACTIONS;
WAFER FABRICATION SYSTEMS;
WORK-IN PROCESS (WIP);
JUST IN TIME PRODUCTION;
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EID: 0032656193
PISSN: 00207543
EISSN: 1366588X
Source Type: Journal
DOI: 10.1080/002075499191319 Document Type: Article |
Times cited : (42)
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References (8)
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