Optimal batching in a wafer fabrication facility using a multiproduct G/G/c model with batch processing

International Journal of Production Research

Volumn 40, Issue 2, 2002, Pages 275-292

  Fowler, J W ^a   Phojanamongkolkij, N ^a   Cochran, J K ^a   Montgomery, D C ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; FABRICATION; GENETIC ALGORITHMS; QUEUEING THEORY; SERVERS;

BATCH PROCESSING; OPTIMAL BATCHING; WAFER FABRICATION FACILITY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0037138041     PISSN: 00207543     EISSN: None     Source Type: Journal    
DOI: 10.1080/00207540110081489     Document Type: Article

References (20)

1. Approximations for product departures from a single-server station with batch processing in multi-product queues
2. Computational analysis of single-server bulk service queues, M/G(y)/1
3. Parallel-machine batching and scheduling to minimize total completion time
4. Batching to minimize total production time for two part types
5. Control of multiproduct bulk server diffusion/oxidation processes part two: Multiple servers
6. Real-time control of multiproduct bulk-service semiconductor manufacturing processes
7. Dynamic batching heuristic for simultaneous processing
8. Control of batch processing systems in semiconductor wafer fabrication facilities
9. Flow time distributions in queues with customer batching and setup times
10. Scheduling with batching: Two job types
11. A general bulk service queue with arrival rate dependent on server breakdown
12. Analytical models of batch processing for optimal design of semiconductor manufacturing
13. The queuing network analyzer