Thin films for 3D: ALD for non-planar topographies

Solid State Technology

Volumn 52, Issue 6, 2009, Pages 14-17

  Sundaram, Ganesh M ^a   Deguns, Eric W ^a   Bhatia, Ritwik ^a   Dalberth, Mark J ^a   Sowa, Mark J ^a   Becker, Jill S ^a  

^a Cambridge NanoTech   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM CONFORMALITY; MEMSDEVICES; NON-PLANAR SUBSTRATES; STEP COVERAGE; THIN-FILM DEPOSITION TECHNIQUE;

ATOMIC LAYER DEPOSITION; DENTAL MATERIALS; DENTAL PROSTHESES; THIN FILMS;

DEPOSITION;

EID: 68249109399     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

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