|
Volumn 11, Issue 2, 2011, Pages 288-295
|
Fabrication of monolithic 3D micro-systems
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ARTICLE;
DEVICE;
FILTER;
FLUORESCENCE MICROSCOPE;
GEOMETRY;
ILLUMINATION;
MICROELECTROMECHANICAL SYSTEM;
PRIORITY JOURNAL;
TECHNOLOGY;
|
EID: 78650319997
PISSN: 14730197
EISSN: 14730189
Source Type: Journal
DOI: 10.1039/c0lc00331j Document Type: Article |
Times cited : (20)
|
References (30)
|