Effects of nonlocal electron kinetics and transition from a to 7 regime in an rf capacitive discharge in nitrogen

IEEE Transactions on Plasma Science

Volumn 26, Issue 2, 1998, Pages 167-174

  Tatarova, Elena ^a   Stoykova, Eli ^a   Bachev, Kostadin ^a   Zhelyazkov, Ivan ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

A and 7 regimes; Electron energy distribution function; Local and nonlocal plasma response; Rf discharges

Indexed keywords

CURRENT DENSITY; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; ELECTRODES; ELECTRONS; FUNCTIONS; NITROGEN;

CAPACITIVE DISCHARGES; ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF); LANGMUIR PROBES; NONLOCAL ELECTRON KINETICS;

PLASMA COLLISION PROCESSES;

EID: 0032047013     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.669620     Document Type: Article

References (37)

1. D. B. Graves and K. F. Jensen, "A continuum model of DC and RF discharges," IEEE Trans. Plasma Sei, vol. PS14, pp. 78-91, Apr. 1986.
2. M. Capitelli, R. Celiberto, C. Gorse, R. Winkler, and J. Wilhelm, "Electron energy distribution functions in radio-frequency collision dominated nitrogen discharges," J. Phys. D, Appl. Phys., vol. 21, pp. 691-699, 1988.
3. W. Nicholas, G. Hitchon, T. J. Sommerer, and J. E. Lawler, "A selfconsistent kinetic plasma model with rapid convergence," IEEE Trans. Plasma Sei., vol. 19, pp. 113-121, Apr. 1991.
4. A. S. Smirnov and L. D. Tsendin, "The space-time-averaging procedure and modeling of the RF discharge," IEEE Trans. Plasma Sei., vol. 19, pp. 130-140, Apr. 1991.
5. M. Surendra and D. B. Graves, "Particle simulations of radio-frequency glow discharges," IEEE Trans. Plasma Sei., vol. 19, pp. 144-157, Apr. 1991.
6. T. Kimura and K. Ohe, "Electron energy distribution detection in symmetrically driven RF argon discharge," Jpn. J. Appl. Phys., vol. 32, pp. 3601-3605, 1993.
7. V. L. Kovalevskii and V. P. Savinov, "Experimental substantiation of a model for the physical mechanism of a low-pressure capacitive RF discharge," Fiz. Plazmy, vol. 20, pp. 322-334, 1994.
8. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, "Measurements of electron energy distribution in low-pressure RF discharges," Plasma Sources Sei. TeehnoL, vol. 1, pp. 36-59, 1992.
9. V. I. Kolobov and V. A. Godyak, "Nonlocal electron kinetics in collisional gas discharge plasmas," IEEE Trans. Plasma Sei., vol. 23, pp. 503-531, Aug. 1995.
10. O. A. Popov and V. A. Godyak, "Power dissipated in low-pressure radio-frequency discharge plasmas," J. Appl. Phys., vol. 57, pp. 53-58, 1985.
11. O. A. Popov and V. A. Godyak, "Electron oscillation velocity and electric field in collisionless radio-frequency discharge plasmas," J. Appl. Phys., vol. 59, pp. 1759-1761, 1986.
12. V. A. Godyak and R. B. Piejak, "Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz," Phys. Rev. Lett., vol. 65, pp. 996-999, 1990.
13. M. M. Turner and M. B. Hopkins, "Anomalous sheath heating in a low pressure rf discharge in nitrogen," Phys. Rev. Lett., vol. 69, pp. 3511-3514, 1992.
14. M. M. Turner, "Pressure heating of electrons in capacitively coupled rf discharges," Phys. Rev. Lett., vol. 75, pp. 1312-1315, 1995.
15. B. P. Wood, M. A. Lieberman, and A. J. Lichtenberg, "Stochastic electron heating in a capacitive RF discharge with non-Maxwellian and time-varying distributions," IEEE Trans. Plasma Sei., vol. 23, pp. 89-96, Feb. 1995.
16. M. M. Turner, D. A. W. Hutchinson, R. A. Doyle, and M. B. Hopkins, "Heating mode transition induced by a magnetic field in a capacitive rf discharge," Phys. Rev. Lett., vol. 76, pp. 2069-2072, 1996.
17. S. M. Levitskii, "Investigation of the breakdown voltage of a HF gas discharge in the transition range of frequencies and pressures," Zh. Tekh. Fiz., vol. 27, pp. 970-977, 1957.
18. V. A. Godyak and A. S. Khanneh "Ion bombardment secondary electron maintenance of steady RF discharge," IEEE Trans. Plasma Sei., vol. PS14, pp. 112-123, Apr. 1986.
19. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, "Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode," Phys. Rev. Lett., vol. 68, pp. 40-13, 1992.
20. E. Tatarova and D. Zamfirov, "A radially resolved experimental investigation of the electron energy distribution function in a microwave discharge sustained by propagating surface waves," J. Phys. D, Appl. Phys.. vol. 28, pp. 1354-1361, 1995.
21. G. Dilecce, M. Capitelli, and S. De Benedictis, "Electron-energy distribution function measurements in capacitively coupled rf discharges," J. Appl. Phys.. vol. 69, pp. 121-128, 1991.
22. V. Vahedi, C. K. Birdsall, M. A. Lieberman, G. DiPeso, and T. D. Rognlien, "Capacitive RF discharge modeled by particle-in-cell Monte Carlo simulation. II: comparison with laboratory measurements of electron energy distribution function," Plasma Sources Sei. Technol.. vol. 2, pp. 273-278, 1993.
23. F. A. Cali, P. A. F. Herbert, and W. M. Kelly, "Automated Langmuir probe characterization of methane/hydrogen low-pressure radio frequency discharges in a production reactor," J. Vac. Sei. Technol. A, Vac. Surf. Films, vol. 13, pp. 2920-2923, 1995.
24. J. Loureiro and C. M. Ferreira, "Coupled electron energy and vibrational distribution functions in stationary N2 discharges," J. Phys. D, Appl. Phys.. vol. 19, pp. 17-35, 1986.
25. C. M. Ferreira and J. Loureiro, "Electron excitation rates and transport parameters in high-frequency N2 discharges," J. Phys. D, Appl. Phys., vol. 22, pp. 76-82, 1989.
26. E. Tatarova, F. M. Dias, C. M. Ferreira, V. Guerra, J. Loureiro, E. Stoykova, I. Ghanashev, and I. Zhelyazkov, "Self-consistent kinetic model of a surface-wave-sustained discharge in nitrogen," J. Phys. D, Appl. Phys.. vol. 30, pp. 2663-2676, 1997.
27. F. M. Dias, E. Tatarova, and C. M. Ferreira, "Radially resolved electron energy distribution function measurements in a nitrogen surface wave sustained discharge," in Proc. 3rd Int. Conf. Reactive Plasmas and 14th Symp. Plasma Processing, K. Tachibana and Y. Watanabe, Eds., Kyoto, Japan, 1997, pp. 245-246.
28. M. J. Druyvesteyn, "Der Niedervoltbogen," Z. Phys., vol. 64, pp. 781-798, 1930.
29. I. P. Shkarovsky, T. W. Jonston, and M. P. Bachinski, The Particle Kinetics of Plasmas. Reading, MA: Addison-Wesley, 1996, pp. 77-94, 178-179.
30. K. Bachev, E. Tatarova, E. Stoykova, and N. Djermanova, "Automated Langmuir probe based system for electron energy spectrum measurements in a RFglow discharge," Bulgarian J. Phys., vol. 23, pp. 181-196, 1996.
31. C. I. Pitchford and A. W. Phelps, "Electron swarms in N2 at high E/N" Bull. Am. Phys. Soc., vol. 27, p. 109, 1982.
32. M. A. Heald and C. B. Wharton, Plasma Diagnostics with Microwaves. New York: Wiley, 1965, p. 72.
33. N. A. Gorbunov, K. O. Iminov, and A. A. Kudryavtsev, "Formation of a nonlocal electron energy distribution function in a discharge plasma of molecular gases," Zh. Tekh. Fiz.. vol. 58, pp. 2301-2309, 1988.
34. M. J. Kushner, "Mechanisms for power dissipation in Ar/SiH4 capacitively coupled RF discharges," IEEE Trans. Plasma Sei., vol. PS14, pp. 188-196, Apr. 1986.
35. T. Kimura and K. Ohe, "Pressure dependences of electron energy distribution and power dissipation in symmetrical RF helium discharges," J. Phys. D, Appl. Phys.. vol. 27, pp. 1465-1469, 1994.
36. V. A. Godyak and O. A. Popov, "Experimental investigation of resonance HF discharges," Fiz. Plazmy, vol. 5, pp. 400-407, 1979.
37. Y. P. Raizer and M. N. Shneider, "Longitudinal structure of capacitive radiofrequency 7 discharge and its analogy with direct current glow discharge," J. Phys. D, Appl. Phys., vol. 27, pp. 1457-1464, 1994.