Measurement of the electron energy distribution function in an argon radio-frequency discharge in the γ mode

Applied Physics Letters

Volumn 74, Issue 14, 1999, Pages 1969-1971

  Deegan, C M ^a   Goss, J P ^a   Vender, D ^a   Hopkins, M B ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRON ENERGY LEVELS; FUNCTIONS; PRESSURE EFFECTS; SECONDARY EMISSION;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; LANGMUIR PROBES;

ELECTRIC DISCHARGES;

EID: 0032607208     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123716     Document Type: Article

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