Pressure dependences of electron energy distribution and power dissipation in symmetrical RF discharges of inert gases

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 3 SUPPL. A, 1997, Pages 1274-1281

  Kimura, Takashi ^a   Ohe, Kazuyuki ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Argon; Electron energy distribution; Neon; Power dissipation; RF discharges; Xenon

Indexed keywords

ELECTRON ENERGY DISTRIBUTION FUNCTION; RADIOFREQUENCY GLOW DISCHARGES;

ARGON; ELECTRON ENERGY LEVELS; NEON; PRESSURE EFFECTS; XENON;

GLOW DISCHARGES;

EID: 0031099684     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.1274     Document Type: Article

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