Si3.5Sb2Te3 phase change material for low-power phase change memory application

Chinese Physics Letters

Volumn 27, Issue 10, 2010, Pages

  Ren, Kun ^a,b   Rao, Feng ^a   Song, Zhi Tang ^a   Wu, Liang Cai ^a   Zhou, Xi Lin ^a   Xia, Meng Jiao ^a   Liu, Bo ^a   Feng, Song Lin ^a   Xi, Wei ^a   Yao, Dong Ning ^a   Chen, Bomy ^c  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c SILICON STORAGE TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLINE MATERIALS; PHASE CHANGE MATERIALS; SI-GE ALLOYS;

A-STABLE; ALLOY TARGET; AMORPHOUS SI; COMPOSITES MATERIAL; CRYSTALLINE SI; DATA-RETENTION; LOW POWER; MEMORY APPLICATIONS; PHASE-CHANGE MEMORY; THERMALLY STABLE;

PHASE CHANGE MEMORY;

EID: 78649368361     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/27/10/108101     Document Type: Article

References (13)

1. Atwood G 2008 Science 321 210.
2. Lai S 2003 Int. Electron Device Meeting p 10-11.
3. Pellizzer F, Pirovano A, Ottogalli F, Magistretti M, Scaravaggi M, Zuliani P, Tosi M, Benvenuti A, Besana P, Cadeo S, Marangon T, Morrandi R, Piva R, Spandre A, Zonca R, Modelli A, Varesi E, Lowrey T, Lacaita A, Casagrande G, Cappelletti P and Bez R 2004 Symposium on VLSI Tech. Dig.Tech. Papers p 18.
4. Horii H, Yi J H, Park J H, Ha Y H, Baek I G, Park S O, Hwang Y N, Lee S H, Kim Y T, Lee K H, UIn Chung and Moon J T 2003 Symposium on VLSI Tech. Dig.Tech. Papers p 177
5. Qiao B W, Feng J, Lai Y F, Ling Y, Lin Y Y, Tang T, Cai B C and Chen B 2006 Appl. Surf. Sci. 252 8404.
6. Lankhorst M H R, van Pieterson L, van Schijndel M, Jacobs B A J and Rijpers J C N 2003 Jap. J. Appl. Phys. 42 863.
7. van Pieterson L, Lankhorst M H R, van Schijndel M, Kuiper A E T and Roonsen J H J 2005 J. Appl. Phys. 97 083520.
8. Feng J, Zhang Z F, Zhang Y, Cai B C, Lin Y Y, Tang T A and Chen B 2007 J. Appl. Phys. 101 074502.
9. Zhang Y, Feng J, Zhang Z F, Cai B C, Lin Y Y, Tang T A and Chen B 2008 Appl. Surf. Sci. 254 5602.
10. Zhou X L, Wu L C, Song Z T, Rao F, Liu B, Yao D N, Lin WJ, Li J T, Feng S L and Chen B M 2009 Appl. Phys. Expr. 2 091401.
11. Cheng Y, Han X D, Liu X Q, Zheng K, Zhang Z, Zhang T, Song Z T, Liu B and Feng S L 2008 Appl. Phys. Lett. 93 183113
12. Lacaita A L 2006 Solid-State Electron. 50 24
13. Ren K, Rao F, Song Z T, Wu L C, Zhou X L, Liu B, Feng S L, Xi W and Chen B 2010 Jpn. J. Appl. Phys. 49 080212