Integrated CNTs thin film for MEMS mechanical sensors

Microelectronics Journal

Volumn 41, Issue 12, 2010, Pages 860-864

  Dau, Van Thanh ^a   Yamada, Takeo ^b   Viet Dao, Dzung ^a   Thanh Tung, Bui ^a   Hata, Kenji ^b   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

CNTs film; EB; Gauge factor; MEMS process; Piezoresistive effect; Super growth; SWNT

Indexed keywords

CNTS FILM; EB; GAUGE FACTORS; MEMS PROCESS; PIEZORESISTIVE EFFECTS; SUPER GROWTH; SWNT;

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; GAGES; SINGLE-WALLED CARBON NANOTUBES (SWCN); THIN FILMS; WATER VAPOR;

FILM GROWTH;

EID: 78649321011     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2010.07.012     Document Type: Article

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