Dielectrophoretic assembly and integration of nanowire devices with functional CMOS operating circuitry

Microelectronic Engineering

Volumn 75, Issue 1, 2004, Pages 31-42

  Evoy, S ^a   DiLello, N ^a   Deshpande, V ^a   Narayanan, A ^b   Liu, H ^a   Riegelman, M ^a   Martin, B R ^c   Hailer, B ^b   Bradley, J C ^d   Weiss, W ^c   Mayer, T S ^e   Gogotsi, Y ^f   Bau, H H ^a   Mallouk, T E ^c   Raman, S ^b  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b State University   (United States)

^c PENNSYLVANIA STATE UNIVERSITY   (United States)

^d DREXEL UNIVERSITY   (United States)

^e The Pennsylvania State University   (United States)

^f Drexel University   (United States)

Author keywords

Dielectrophoresis; Integrated systems; Nano assembly; Nanometer structures; Sensors

Indexed keywords

CARBON NANOTUBES; DIELECTRIC PROPERTIES; ELECTRIC RESISTANCE; ELECTROCHEMICAL ELECTRODES; ELECTROPHORESIS; FLUORESCENCE; INTEGRATED CIRCUIT LAYOUT; MICROELECTRONICS; NANOSTRUCTURED MATERIALS; SENSORS;

DIELECTROPHORESIS; INTEGRATED SYSTEMS; NANO-ASSEMBLY; NANOMETER STRUCTURES;

CMOS INTEGRATED CIRCUITS;

EID: 2942579312     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2003.09.010     Document Type: Conference Paper

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