Analysis of simultaneous boron and phosphorus diffusion gettering in silicon

Physica Status Solidi (A) Applications and Materials Science

Volumn 207, Issue 11, 2010, Pages 2589-2592

  Schon J ^a,b   Schubert, M C ^a   Warta, W ^a   Savin, H ^c   Haarahiltunen, A ^c  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

^c AALTO UNIVERSITY   (Finland)

Author keywords

boron diffusion gettering; iron; phosphorus diffusion gettering; silicon solar cells

Indexed keywords

BORON DIFFUSIONS; BORON-DOPED; GETTERING; GETTERING EFFICIENCY; IMPROVED MODELS; IRON CONCENTRATIONS; LOW TEMPERATURES; PHOSPHORUS DIFFUSION; PHOSPHORUS DIFFUSION GETTERING; PHOSPHORUS-DOPED; PHYSICAL MODELING; SOLAR CELL STRUCTURES;

BORON; COMPUTER SIMULATION; DIFFUSION IN SOLIDS; MODELS; SILICON SOLAR CELLS; SOLAR CELLS;

PHOSPHORUS;

EID: 78349276119     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201026333     Document Type: Article

References (15)

1. T. Terakawa, D. Wang, and, H. Nakashima, Jpn. J. Appl. Phys. 45, 2643 (2006).
2. T. Joge, I. Araki, T. Uematsu, T. Warabisako, H. Nakashima, and, K. Matsukuma, Jpn. J. Appl. Phys., Part 1 42, 5397-5404 (2003).
3. J. Schön, and, W. Warta, Proceedings of the 23rd European Photovoltaic Solar Energy Conference, Valencia, Spain, 2008, pp. 1851-1854.
4. A. A. Istratov, T. Buonassisi, R. J. McDonald, A. R. Smith, R. Schindler, J. A. Rand, J. P. Kalejs, and, E. R. Weber, J. Appl. Phys. 94, 6552-6559 (2003).
5. A. Haarahiltunen, H. Talvitie, H. Savin, M. Yli-Koski, M. I. Asghar, and, J. Sinkkonen, Appl. Phys. Lett. 92, 021902/1-3 (2008).
6. V. Vànissi, A. Haarahiltunen, H. Talvitie, M. Yli-Koski, J. Lindroos, and, H. Savin, Phys. Status Solidi RRL 4 (5-6), 136-138 (2010).
7. A. A. Istratov, H. Hieslmair, and, E. R. Weber, Appl. Phys. A 69, 13-44 (1999).
8. H. Kohno, H. Hieslmair, A. A. Istratov, and, E. R. Weber, Appl. Phys. Lett. 76, 2734-2736 (2000).
9. A. Haarahiltunen, H. Và, O. Anttila, M. Yli-Koski, and, J. Sinkkonen, J. Appl. Phys. 101, 043507/1-6 (2007).
10. S. M. Myers, M. Seibt, and, W. Schröter, J. Appl. Phys. 88, 3795-3819 (2000).
11. A. Haarahiltunen, H. Savin, M. Yli-Koski, H. Talvitie, and, J. Sinkkonen, J. Appl. Phys. 105, 023510/1-4 (2009).
12. S. K. Estreicher, M. Sanati, and, N. Gonzalez Szwacki, Solid State Phenom. 131-133, 233 (2008).
13. D. Gilles, W. Schröter, and, W. Bergholz, Phys. Rev. B 41, 5770-5782 (1990).
14. M. B. Shabani, T. Yamashita, and, E. Morita, Solid State Phenom. 131-133, 399-404 (2008).
15. M. Rinio, A. Yodyunyong, M. Pirker, C. Zhang, D. Günther, P. Botchak, S. Keipert, D. Borchert, M. Heuer, and, A. Montesdeoca-Santana, Proceedings of the 24th European Photovoltaic Solar Energy Conference, Hamburg, Germany, 2009, pp. 1816-1819.