SCOPUS 정보 검색 플랫폼

Volumn 131-133, Issue , 2008, Pages 399-404

Study of gettering mechanisms in silicon: Competitive gettering between phosphorus diffusion gettering and other gettering sites

(3) Shabani, Mohammad B a Yamasbita, T a Marita, E a

a SUMCO CORPORATION (Japan)

Author keywords

BMD; Competitive gettering; Cu; Fe; Gettering mechanism; ICP MS; Lifetimes; Multicrystalline; Ni; Phosphorus diffusion gettering; Segregation coefficient

Indexed keywords

CONCENTRATION (PROCESS); DISLOCATIONS (CRYSTALS); GETTERS; SEGREGATION (METALLOGRAPHY); THERMAL DIFFUSION; BORON; COPPER; CRYSTALLINE MATERIALS; DEFECTS; DIFFUSION; IRON; MONOCRYSTALLINE SILICON; NICKEL; NICKEL-PHOSPHORUS; PHOSPHORUS; REMOVAL; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

COMPETITIVE GETTERING; GETTERING MECHANISM; PHOSPHORUS DIFFUSION GETTERING; SEGREGATION COEFFICIENTS; GETTERING; ICP-MS; LIFETIMES; MULTICRYSTALLINE;

SEMICONDUCTING SILICON; SEGREGATION (METALLOGRAPHY);

EID: 38549103594 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (45)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.