Preparation and tribological properties of amorphous Ti/C multilayers by pulsed laser deposition

Advanced Materials Research

Volumn 47-50 PART 1, Issue , 2008, Pages 617-620

  Hong, C F ^a   Tu, J P ^a   Li, R L ^a   Zheng, X H ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Amorphous Ti C multilayer; Friction and wear; Pulsed laser deposition

Indexed keywords

AMORPHOUS CARBON; CARBON FILMS; FILM PREPARATION; FUNCTIONAL MATERIALS; MORPHOLOGY; MULTILAYERS; PULSED LASER DEPOSITION; PULSED LASERS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; TITANIUM ALLOYS; TRIBOLOGY; WEAR OF MATERIALS; WEAR RESISTANCE; AMORPHOUS SILICON; DEPOSITION; SILICON ALLOYS; X RAY DIFFRACTION;

AMORPHOUS TI/C MULTILAYER; AROMATIC BONDS; BALL-ON-DISK; FRICTION AND WEAR; SILICON (100); TRIBOLOGICAL PERFORMANCE; TRIBOLOGICAL PROPERTIES; WAFER SUBSTRATES;

AMORPHOUS SILICON; TITANIUM ALLOYS;

EID: 56349100556     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/amr.47-50.617     Document Type: Conference Paper

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