Pulsed laser deposited tetrahedral amorphous carbon with high s p3 fractions and low optical bandgaps

Journal of Applied Physics

Volumn 105, Issue 7, 2009, Pages

  Miyajima, Y ^a   Henley, S J ^a   Adamopoulos, G ^a   Stolojan, V ^a   Garcia Caurel, E ^a,b   Drvillon B ^a,b   Shannon, J M ^a   Silva, S R P ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON FILMS; BAND GAPS; BONDING CONFIGURATIONS; CARBON FRACTIONS; ELECTRICAL CHARACTERIZATIONS; ELECTRON ENERGY LOSS; ELECTRONIC LOCALIZED STATE; HIGH-ELECTRIC-FIELD CONDUCTIONS; MICRO-STRUCTURAL; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL BAND-GAP; OPTICAL TRANSMITTANCES; PULSED LASERS; STRESS-INDUCED; STRUCTURE CHANGES; TETRAHEDRAL AMORPHOUS CARBON FILMS; TETRAHEDRAL AMORPHOUS CARBONS;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; ELECTRIC FIELDS; ELECTRIC PROPERTIES; ELECTRODEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; ENERGY GAP; OPACITY; OPTICAL BAND GAPS; PULSED LASER DEPOSITION; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY;

OPTICAL FILMS;

EID: 65249176760     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3095667     Document Type: Article

References (43)

1. S. Bhattacharyya, S. J. Henley, E. Mendoza, L. Gomez-Rojas, J. Allam, and S. R. P. Silva, Nature Mater. 1476-1122 10.1038/nmat1551 5, 19 (2006).
2. S. R. P. Silva, B. Rafferty, G. A. J. Amaratunga, J. Schwan, D. F. Franceschini, and L. M. Brown, Diamond Relat. Mater. 0925-9635 10.1016/0925-9635(95)00446-7 5, 401 (1996).
3. Amorphous Carbon: State of the Art, edited by, S. R. P. Silva, J. Robertson, W. I. Milne, and, G. A. J. Amaratunga, (World Scientific, Singapore, 1997).
4. J. Robertson, Mater. Sci. Eng. R. 0927-796X 10.1016/S0927-796X(02)00005-0 37, 129 (2002).
5. G. Reisse, S. Weissmantel, and D. Rost, Appl. Phys. A: Mater. Sci. Process. 79, 1275 (2004). 0947-8396
6. S. J. Henley, J. D. Carey, S. R. P. Silva, G. M. Fuge, M. N. R. Ashfold, and D. Anglos, Phys. Rev. B 0163-1829 10.1103/PhysRevB.72.205413 72, 205413 (2005).
7. P. Kovarik, E. B. D. Bourdon, and R. H. Prince, Phys. Rev. B 0163-1829 10.1103/PhysRevB.48.12123 48, 12123 (1993).
8. M. P. Siegal, J. C. Barbour, P. N. Provencio, D. R. Tallant, and T. A. Friedmann, Appl. Phys. Lett. 0003-6951 10.1063/1.121992 73, 759 (1998).
9. R. Haerle, A. Pasquarello, and A. Baldereschi, Comput. Mater. Sci. 0927-0256 10.1016/S0927-0256(01)00167-7 22, 67 (2001).
10. T. Katsuno, C. Godet, A. S. Loir, and F. Garrelier, J. Non-Cryst. Solids 0022-3093 10.1016/j.jnoncrysol.2005.09.038 352, 1421 (2006).
11. Q. Z. Xue and X. Zhang, Carbon 0008-6223 10.1016/j.carbon.2004.10.051 43, 760 (2005).
12. G. E. Jellison and F. A. Modine, Appl. Phys. Lett. 0003-6951 10.1063/1.118064 69, 371 (1996).
13. Properties of Amorphous Carbon, edited by, S. R. P. Silva, (INSPEC Publication/IEE, London, 2003).
14. J. Robertson, Diamond Relat. Mater. 0925-9635 10.1016/S0925-9635(96) 00627-9 6, 212 (1997).
15. S. R. P. Silva and G. A. J. Amaratunga, Thin Solid Films 0040-6090 10.1016/0040-6090(94)90310-7 253, 146 (1994).
16. G. A. J. Amaratunga, V. S. Veerasamy, W. I. Milne, C. A. Davis, S. R. P. Silva, and H. S. Mackenzie, Appl. Phys. Lett. 0003-6951 10.1063/1.110046 63, 370 (1993).
17. S. D. Berger, D. R. Mckenzie, and P. J. Martin, Philos. Mag. Lett. 0950-0839 10.1080/09500838808214715 57, 285 (1988).
18. P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga, W. I. Milne, and J. Koskinen, Phys. Rev. B 0163-1829 10.1103/PhysRevB.48.4777 48, 4777 (1993).
19. J. Fink, T. Mullerheinzerling, J. Pfluger, A. Bubenzer, P. Koidl, and G. Crecelius, Solid State Commun. 0038-1098 10.1016/0038-1098(83)90635-X 47, 687 (1983).
20. S. R. P. Silva and V. Stolojan, Thin Solid Films 0040-6090 10.1016/j.tsf.2005.04.025 488, 283 (2005).
21. A. J. Papworth, C. J. Kiely, A. P. Burden, S. R. P. Silva, and G. A. J. Amaratunga, Phys. Rev. B 0163-1829 10.1103/PhysRevB.62.12628 62, 12628 (2000).
22. J. T. Titantah and D. Lamoen, Phys. Rev. B 0163-1829 10.1103/PhysRevB.70. 075115 70, 075115 (2004).
23. A. C. Ferrari, A. Libassi, B. K. Tanner, V. Stolojan, J. Yuan, L. M. Brown, S. E. Rodil, B. Kleinsorge, and J. Robertson, Phys. Rev. B 0163-1829 10.1103/PhysRevB.62.11089 62, 11089 (2000).
24. J. Schwan, S. Ulrich, T. Theel, H. Roth, H. Ehrhardt, P. Becker, and S. R. P. Silva, J. Appl. Phys. 0021-8979 10.1063/1.366469 82, 6024 (1997).
25. A. C. Ferrari and J. Robertson, Phys. Rev. B 0163-1829 10.1103/PhysRevB.61.14095 61, 14095 (2000).
26. S. Prawer, K. W. Nugent, Y. Lifshitz, G. D. Lempert, E. Grossman, J. Kulik, I. Avigal, and R. Kalish, Diamond Relat. Mater. 0925-9635 10.1016/0925-9635(95)00363-0 5, 433 (1996).
27. A. C. Ferrari and J. Robertson, Phys. Rev. B 0163-1829 10.1103/PhysRevB.64.075414 64, 075414 (2001).
28. M. Yoshikawa, Material Science Forum 52-53, 365 (1989). 0163-1829
29. J. Schwan, S. Ulrich, H. Roth, H. Ehrhardt, S. R. P. Silva, J. Robertson, R. Samlenski, and R. Brenn, J. Appl. Phys. 0021-8979 10.1063/1.360979 79, 1416 (1996).
30. R. A. Street, Hydrogenated Amorphous Silicon (Cambridge University Press, Cambridge, England, 1991).
31. A. A. Voevodin, S. J. P. Laube, S. D. Walck, J. S. Solomon, M. S. Donley, and J. S. Zabinski, J. Appl. Phys. 0021-8979 10.1063/1.359871 78, 4123 (1995).
32. A. Chambers, Mordan Vacuum Physics (CRC, Boca Raton, FL, 2005).
33. S. Ulrich, C. Bauer, H. Holleck, H. Leiste, M. Stuber, J. Ye, and J. Schwan, Diamond Relat. Mater. 11, 1010 (2002).
34. J. K. Shin, C. S. Lee, K. R. Lee, and K. Y. Eun, Appl. Phys. Lett. 0003-6951 10.1063/1.1343840 78, 631 (2001).
35. Y. Miyajima, J. M. Shannon, S. J. Henley, V. Stolojan, D. C. Cox, and S. R. P. Silva, Thin Solid Films 0040-6090 10.1016/j.tsf.2007.06.064 516, 257 (2007).
36. S. P. Lau, J. M. Shannon, and B. J. Sealy, J. Non-Cryst. Solids 227-230, 533 (1998). 0022-3093
37. J. G. Simmons, Phys. Rev. 10.1103/PhysRev.155.657 155, 657 (1967). 0031-899X
38. C. Ronning, U. Griesmeier, M. Gross, H. C. Hofsass, R. G. Downing, and G. P. Lamaze, Diamond Relat. Mater. 0925-9635 10.1016/0925-9635(94)05219-0 4, 666 (1995).
39. B. A. Gregg, S. G. Chen, and R. A. Cormier, Chem. Mater. 0897-4756 10.1021/cm049625c 16, 4586 (2004).
40. G. Lazar, K. Zellama, M. Clin, and C. Godet, Appl. Phys. Lett. 0003-6951 10.1063/1.1839649 85, 6176 (2004).
41. M. Stutzmann, Philos. Mag. B 1364-2812 10.1080/13642818908205926 60, 531 (1989).
42. J. Robertson, Philos. Mag. B 76, 335 (1997).
43. Y. Miyajima, A. A. D. T. Adikaari, S. J. Henley, J. M. Shannon, and S. R. P. Silva, Appl. Phys. Lett. 0003-6951 10.1063/1.2908208 92, 152104 (2008).