Very large spot size effect in nanosecond laser drilling efficiency of silicon

Optics Express

Volumn 18, Issue 22, 2010, Pages 23488-23494

  Brandi, F ^a   Burdet, N ^a   Carzino, R ^a   Diaspro, A ^a  

^a ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; GAS LASERS; LASER PULSES; POLYIMIDES; SILICON WAFERS;

ABLATION EFFICIENCY; DEEP-UV LASERS; FLUENCES; NANOSECOND LASERS; SHIELDING EFFECT; SPOT DIAMETER; SPOT SIZES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 78149372435     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.023488     Document Type: Article

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