New perspectives for the Silicon-On-Diamond material

Proceedings of Science

Volumn , Issue , 2009, Pages

  Lagomarsino, S ^a   Parrini, G ^a   Sciortino, S ^a   Fossati, A ^a   Citroni, M ^b,c   Ferrari, G ^b,c   Gorelli, F ^b,c   Santoro, M ^b,c   Molesini, G ^d   Vannoni, M ^d   Marras, A ^e,f   Scorzoni, A ^e   Ranieri, A ^g   Berdondini, L ^h   Brandi, F ^h   Carzino, R ^h   Diaspro, A ^h   Scotto, M ^h   Torre, B ^h  

^a UNIVERSITY OF FLORENCE   (Italy)

^b UNIVERSITY OF FLORENCE   (Italy)

^c SAPIENZA UNIVERSITY OF ROME   (Italy)

^d INFN SEZIONE DI FIRENZE   (Italy)

^e CNR   (Italy)

^f UNIVERSITY OF PERUGIA   (Italy)

^g POLITECNICO DI BARI   (Italy)

^h ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL APPLICATIONS; LASER BONDING; LASER TECHNIQUE; NEW PROJECTS; WIDE FIELD;

HARDNESS; HIGH ENERGY PHYSICS; SEMICONDUCTOR DETECTORS; SILICON;

DIAMONDS;

EID: 84883538710     PISSN: None     EISSN: 18248039     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

1. G. K. Celler, S. Cristoloveanu, Frontiers of silicon-on-insulator, J. Appl. Phys. 93 (2003) 4955.
2. K. Raleva, D. Vasileska, S. M. Goodnick, Is SOD technology the solution to heating problems in SOI devices?, IEEE Trans. Electron Devices 29 (2008) 621.
3. J.-P. Mazellier, O. Faynot, S. Cristoloveanu, S. Deleonibus, P. Bergonzo, Integration of diamond in fully-depleted silicon-on-insulator technology as buried insulator: A theoretical analysis, Diamond Relat. Mater. 17 (2008) 1248.
4. D. Francis, F. Faili, D. Babic, F. Ejeckam, A. Nurmikko, H. Maris, Formation and characterization of 4-inch GaN-on-diamond substrates, Diamond Relat. Mater., 2009, article in press.
5. A. Aleksov, X. Li, N. Govindaraju, J. Gobien, S. Wolter, J. Prater, Z. Sitar, Silicon-on-diamond: An advanced silicon-on-insulator technology, Diamond Relat. Mater. 14 (2005) 308.
6. A. Aleksov, J. Gobien, X. Li, J. Prater, Z. Sitar, Silicon-on-diamond an engineered substrate for electronic applications, Diamond Relat. Mater. 15 (2006) 248.
7. A. Kaiser, D. Kueck, P. Benkart, A. Munding, G. Prinz, A. Heittmann, H. Huebner, R. Sauer, E. Kohn, Concept for diamond 3-D integrated UV sensor, Diamond Relat. Mater. 15 (2006) 1967.
8. N. Wermes, Pixel detectors for charged particles, Nucl. Instrum. Methods Phys. Res. A 604 (2009) 370.
9. A. BenMoussa, A. Theissen, F. Scholze, J. F. Hochedez, U. Schühle, W. Schmutz, et al Performance of diamond detectors for VUV applications, Nucl. Instrum. Methods Phys. Res. A 568 (2006) 398
10. M. Rebisz-Pomorska, D. Tromson, A. Isambert, B. Marczewska, and P. Bergonzo, Single crystal chemical vapor deposited diamond detectors for intensity-modulated radiation therapy applications, J. Appl. Phys. 106 (2009) 084509.
11. P. Ariano, A. L. Giudice, A. Marcantoni, E. Vittone, E. Carbone, D. Lovisolo, A diamond-based biosensor for the recording of neuronal activity, Biosens. Bioelectron. 24 (2009) 2046.
12. M. Bonnauron, S. Saada, L. Rousseau, G. Lissorgues, C. Mer, P. Bergonzo, High aspect ratio diamond microelectrode array for neuronal activity measurements, Diamond Relat. Mater. 17 (2008) 1399.
13. G. N. Yushin, S. D. Wolter, A. V. Kvit, R. Collazo, B. R. Stoner, J. T. Prater, Z. Sitar, Study of fusion bonding of diamond to silicon for silicon-on-diamond technology, Appl. Phys. Lett. 81 (2002) 3275.
14. G. Yushin, A. Aleksov, S. Wolter, F. O., J. Prater, Z. Sitar, Wafer bonding of highly oriented diamond to silicon, Diamond Relat. Mater. 13 (2004) 1816.
15. J.-P. Mazellier, J. Widiez, F. Andrieu, M. Lions, S. Saada, M. Hasegawa, K. Tsugawa, L. Brevard, J. Dechamp, M. Rabarot, V. Delaye, S. Cristoloveanu, L. Clavelier, S. Deleonibus, P. Bergonzo, O. Faynot, First demonstration of heat dissipation improvement in CMOS technology using Silicon-On-Diamond (SOD) substrates, in proceedings of SOI Conference, 2009 IEEE International Foster City, CA, USA.
16. S. Lagomarsino, G. Parrini, S. Sciortino, M. Santoro, M. Citroni, M. Vannoni, A. Fossati, F. Gorelli, G. Molesini, and A. Scorzoni, Silicon-on-diamond material by pulsed laser technique, Appl. Phys. Lett. 96 (2010) 031901.
17. R. Walker, S. Prawer, D. N. Jamieson and K. W. Nugent and R. Kalish, Formation of buried p-type conducting layers in diamond 71 (1997) 1492-1494.
18. T. V. Kononenko, M. S. Komlenok, V. P. Pashinin, S. M. Pimenov, V. I. Konov, M. Neff, V. Romano, W. Lüthy, Femtosecond laser microstructuring in the bulk of diamond, Diamond Relat. Mater. 18 (2008) 196-199.
19. K. Imfeld, S. Neukom, A. Maccione, Y. Bornat, S. Martinoia, P.-A. Farine, M. Koudelka-Hep, L. Berdondini, Large-scale, high-resolution data acquisition system for extracellular recording of electrophysiological activity, IEEE Trans. Biomed. Eng. 55 (2008) 2064.
20. L. Berdondini, K. Imfeld, A. Maccione, M. Tedesco, S. Neukom, M. Koudelka-Hep, S. Martinoia, Active pixel sensor array for high spatio-temporal resolution electrophysiological recordings from single cell to large scale neuronal networks, Lab On Chip 9 (2009) 2644-2651.