Nd-YAG laser microvia drilling for interconnection application

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1511-1517

  Tan, Bo ^a   Venkatakrishnan, Krishnan ^a  

^a RYERSON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DRILLING; MICROANALYSIS; MICROELECTRONICS; NEODYMIUM LASERS; SEMICONDUCTOR DIODES;

DIODE-PUMPED SOLID-STATE ND-YAG LASERS; DRILLING QUALITY; MULTIPLE-SHOT ABLATION;

ELECTRIC POWER SYSTEM INTERCONNECTION;

EID: 34547663219     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/013     Document Type: Article

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