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Volumn 11, Issue 4, 2010, Pages

Characterization of Bi and Fe co-doped PZT capacitors for FeRAM

Author keywords

Doping effects; Fatigue; Ferroelectric; Film; Oxides; Polarization; PUND; PZT

Indexed keywords


EID: 78149348797     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1088/1468-6996/11/4/044402     Document Type: Article
Times cited : (24)

References (30)
  • 1
    • 33845910181 scopus 로고    scopus 로고
    • Edition, available on-line from ITRS web site or from International Sematech Inc., ITRS Department Austin, Texas, USA
    • International Technology Road Map for Semiconductors 2009 Edition, available on-line from ITRS web site or from International Sematech Inc., ITRS Department Austin, Texas, USA
    • (2009) International Technology Road Map for Semiconductors


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.