Evolution of silicon surface microstructure induced by Nd:YAG nanosecond laser

Wuli Xuebao/Acta Physica Sinica

Volumn 59, Issue 10, 2010, Pages 7015-7019

  Yuan, Chun Hua ^a   Li, Xiao Hong ^a   Tang, Duo Chang ^a   Yang, Hong Dao ^a   Li, Guo Qiang ^a  

^a SOUTHWEST UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Evolution; Nanosecond laser inducing; Silicon; Surface microstructure

Indexed keywords

EID: 78149254103     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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