Femtosecond laser ablation of silicon wafers in air and water

Wuli Xuebao/Acta Physica Sinica

Volumn 58, Issue 8, 2009, Pages 5429-5435

  Wang, Rui ^a   Yang, Jian Jun ^a   Liang, Chun Yong ^b   Wang, Hong Shui ^b   Han, Wei ^a   Yang, Yang ^a  

^a NANKAI UNIVERSITY   (China)

^b HEBEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Femtosecond lasers; Laser micromachining; Silicon wafer

Indexed keywords

EID: 69749092475     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

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