Using the power spectral density method to characterise the surface topography of optical surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7801, Issue , 2010, Pages

  Alcock, Simon G ^a   Ludbrook, Geoff D ^a   Owen, Tommy ^b   Dockree, Richard ^c  

^a DIAMOND LIGHT SOURCE LTD   (United Kingdom)

^b UNIVERSITY OF NOTTINGHAM   (United Kingdom)

^c UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

figure error; optical specification; power spectral density; spatial frequency roughness

Indexed keywords

ALTERNATIVE METHODS; FIELD OF VIEWS; FIGURE ERROR; FIZEAU INTERFEROMETERS; HEURISTIC INFORMATION; INSTRUMENT CALIBRATIONS; MANUFACTURING TECHNIQUES; MATLAB ALGORITHM; METROLOGY DATA; OPTICAL SPECIFICATION; OPTICAL SURFACES; POWER SPECTRAL DENSITY METHOD; ROOT MEAN SQUARE; SPATIAL BANDWIDTH; SPATIAL FREQUENCY; SPATIAL FREQUENCY ROUGHNESS; SURFACE ERROR; SYNCHROTRON OPTICS;

ERRORS; INTERFEROMETERS; LASER OPTICS; POWER SPECTRAL DENSITY; SPECIFICATIONS; SURFACE TOPOGRAPHY; SYNCHROTRONS;

FAST FOURIER TRANSFORMS;

EID: 78049397168     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.861539     Document Type: Conference Paper

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