Use of power spectral density (PSD) to specify optical surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2775, Issue , 1996, Pages 240-250

  Toebben, Helmut ^a   Ringel, Gabriele ^a   Kratz, Frank ^a   Schmitt, Dirk Roger ^a  

^a GERMAN AEROSPACE CENTER DLR   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; MICROROUGHNESS; POWER SPECTRAL DENSITY; PROFILOMETERS;

HETERODYNING; MICROSCOPES;

SURFACE ROUGHNESS;

EID: 0029766399     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)