No such thing as σ - Flowdown and measurement of surface roughness requirements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6291, Issue , 2006, Pages

  Dittman, Michael G ^a   Grochocki, Frank ^a   Youngworth, Kathleen ^a  

^a BALL AEROSPACE AND TECHNOLOGIES CORP   (United States)

Author keywords

BRDF; Optics scatter; PSD; Sigma; Stray light; Surface roughness

Indexed keywords

BANDWIDTH; PARAMETER ESTIMATION; SPECIFICATIONS; STRAY LIGHT; SURFACE PROPERTIES;

OPTICS SCATTER; PSD; ZYGO NEWVIEW PROFILOMETERS;

SURFACE ROUGHNESS;

EID: 33750584260     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.678314     Document Type: Conference Paper

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