A Fizeau interferometer system, with double-pass and stitching, for characterizing the figure error of large ( >1m ) synchrotron optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7389, Issue , 2009, Pages

  Ludbrook, G D ^a   Alcock, S G ^a   Sawhney, K J S ^a  

^a DIAMOND LIGHT SOURCE LTD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

APRIORI; AUTOCOLLIMATORS; DEGREES OF FREEDOM; DOUBLE PASS; DOUBLE-PASS GEOMETRY; FIELDS OF VIEWS; FIGURE ERROR; FIZEAU INTERFEROMETERS; NANOMETER LEVEL; SINGLE-PASS GEOMETRY; SYNCHROTRON OPTICS;

GEOMETRY; INTERFEROMETERS; INTERFEROMETRY; LASER OPTICS; OPTICAL DATA PROCESSING; OPTICAL VARIABLES MEASUREMENT; SURFACE TOPOGRAPHY; SYNCHROTRONS;

OPTICAL TESTING;

EID: 69949155759     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.827865     Document Type: Conference Paper

References (3)

1. Stitching Interferometry and Absolute Surface Shape Metrology: Similarities, M. Bray, Optical Manufacturing and Technology IV, Proceedings of SPIE Vol. 4451 (2001).
2. Stitching Interferometry: How and why it works, EUROPTO, Conference on Optical Fabrication and Testing, Berlin, Proceedings of SPIE Vol. 3739 (May 1999).
3. Progress in the x-ray optics and metrology lab at Diamond Light Source, Simon G. Alcock, K. J. S. Sawhney. Proceedings of SPIE Vol. 6704, Advances in Metrology for XRay and EUV Optics II,